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1.DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE RESISTS 审中-公开
Title translation: 可展反射地板材料组合物阴性油漆公开(公告)号:EP2742385A4
公开(公告)日:2014-06-18
申请号:EP12822200
申请日:2012-08-10
Applicant: IBM
Inventor: CHEN KUANG-JUNG , HOLMES STEVEN J , HUANG WU-SONG , LIU SEN
IPC: G03F7/004 , C09D133/04 , C09J133/14 , G03F7/038 , G03F7/039 , G03F7/09 , G03F7/095
CPC classification number: G03F7/0382 , C09J133/14 , G03F7/091 , G03F7/094 , G03F7/095