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公开(公告)号：EP1994563A4
公开(公告)日：2011-06-22
申请号：EP07797080
申请日：2007-01-16
Applicant: IBM
Inventor： CLEVENGER LAWRENCE A , DALTON TIMOTHY J , HSU LOUIS C , RADENS CARL , WONG KWONG-HON , YANG CHIH-CHAO
IPC: H01L27/01 , H01L21/8234
CPC classification number: H01L27/1203 , H01L21/28114 , H01L21/823456 , H01L21/84 , H01L29/42376 , H01L2924/0002 , H01L2924/00
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