公开(公告)号：EP3504738A1

公开(公告)日：2019-07-03

申请号：EP17844545.8

申请日：2017-08-25

申请人： INTEL Corporation

发明人： BLOCK, Bruce ,  RAO, Valluri R. ,  MEHANDRU, Rishabh ,  INGERLY, Doug ,  JUN, Kimin ,  O'BRIEN, Kevin ,  MORROW, Patrick ,  FISCHER, Paul ,  LIAO, Szyua S.

IPC分类号： H01L31/18 ,  H01L31/042 ,  H02S20/20

公开(公告)号：EP1478962A2

公开(公告)日：2004-11-24

申请号：EP03715990.2

申请日：2003-02-07

申请人： INTEL CORPORATION

发明人： DAVIDS, Paul ,  RESHOTKO, Miriam ,  BLOCK, Bruce

IPC分类号： G02B6/42 ,  H01L31/10

CPC分类号： G02B6/4214 ,  G02B2006/12061

摘要： A waveguide including a waveguide core having a top surface that defines an angle. A waveguide can include a waveguide core offset from a substrate by a cladding layer. A phototransistor includes an emitter, a collector, and a base in lateral alignment. A photodiode includes n- and p- type regions and an intrinsic substrate portion in lateral alignment. A waveguide includes a waveguide core, an attenuating layer, and a detector layer. A method for fabricating a device includes forming a cladding layer over a substrate having a detector layer formed thereon; forming an opening in the cladding layer to expose the detector layer; forming a waveguide layer over the cladding layer and the opening; removing a portion of the waveguide layer to define a waveguide core; and implanting first and second regions into the detector layer proximate the waveguide core.

公开(公告)号：EP1478962B1

公开(公告)日：2008-04-23

申请号：EP03715990.2

申请日：2003-02-07

申请人： Intel Corporation

发明人： DAVIDS, Paul ,  RESHOTKO, Miriam ,  BLOCK, Bruce

IPC分类号： G02B6/42 ,  H01L31/10

CPC分类号： G02B6/4214 ,  G02B2006/12061

摘要： A waveguide including a waveguide core having a top surface that defines an angle. A waveguide can include a waveguide core offset from a substrate by a cladding layer. A phototransistor includes an emitter, a collector, and a base in lateral alignment. A photodiode includes n- and p- type regions and an intrinsic substrate portion in lateral alignment. A waveguide includes a waveguide core, an attenuating layer, and a detector layer. A method for fabricating a device includes forming a cladding layer over a substrate having a detector layer formed thereon; forming an opening in the cladding layer to expose the detector layer; forming a waveguide layer over the cladding layer and the opening; removing a portion of the waveguide layer to define a waveguide core; and implanting first and second regions into the detector layer proximate the waveguide core.