HIGH BREAKDOWN VOLTAGE III-N DEPLETION MODE MOS CAPACITORS
    1.
    发明公开
    HIGH BREAKDOWN VOLTAGE III-N DEPLETION MODE MOS CAPACITORS 审中-公开
    WITH IN A III-N-DUMP MODE高击穿电压的MOS电容器

    公开(公告)号:EP2901481A1

    公开(公告)日:2015-08-05

    申请号:EP13842878.4

    申请日:2013-06-20

    申请人: Intel Corporation

    IPC分类号: H01L27/108 H01L21/8242

    摘要: III-N high voltage MOS capacitors and System on Chip (SoC) solutions integrating at least one III-N MOS capacitor capable of high breakdown voltages (BV) to implement high voltage and/or high power circuits. Breakdown voltages over 4V may be achieved avoiding any need to series couple capacitors in an RFIC and/or PMIC. In embodiments, depletion mode III-N capacitors including a GaN layer in which a two dimensional electron gas (2DEG) is formed at threshold voltages below 0V are monolithically integrated with group IV transistor architectures, such as planar and non-planar silicon CMOS transistor technologies. In embodiments, silicon substrates are etched to provide a (111) epitaxial growth surface over which a GaN layer and III-N barrier layer are formed. In embodiments, a high-K dielectric layer is deposited, and capacitor terminal contacts are made to the 2DEG and over the dielectric layer.