公开(公告)号：EP3314664A1

公开(公告)日：2018-05-02

申请号：EP15896566.5

申请日：2015-06-26

Applicant: INTEL Corporation

Inventor： AVCI, Uygar E. ,  MORRIS, Daniel H. ,  YOUNG, Ian A. ,  RAMEY, Stephen M.

IPC: H01L29/78 ,  H01L21/336

CPC classification number: H01L27/11521 ,  G11C16/0408 ,  G11C16/10 ,  G11C16/14 ,  G11C16/26 ,  H01L21/28079 ,  H01L21/28088 ,  H01L21/28273 ,  H01L21/76224 ,  H01L27/0207 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11558 ,  H01L29/0649 ,  H01L29/4916 ,  H01L29/495 ,  H01L29/4966 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/78 ,  H01L29/7851 ,  H01L29/788 ,  H01L29/7881

Abstract: Embodiments of the present disclosure provide techniques and configurations for semi-volatile embedded memory with between-fin floating gates. In one embodiment, an apparatus includes a semiconductor substrate and a floating-gate memory structure formed on the semiconductor substrate including a bitcell having first, second, and third fin structures extending from the substrate, an oxide layer disposed between the first and second fin structures and between the second and third fin structures, a gate of a first transistor disposed on the oxide layer and coupled with and extending over a top of the first fin structure, and a floating gate of a second transistor disposed on the oxide layer between the second and third fin structures. Other embodiments may be described and/or claimed.