摘要:
A Dynamic Random Access Memory (DRAM) includes an array of memory cells 160 arranged in rows and columns, a word line in each row responsive to a row address and, a pair of complementary bit lines in each column. The DRAM also includes a sense amp 166 in each column connected between a sense enable and the pair of complementary bit lines. The sense amp is a pair of cross coupled NFETs 168, 170, with the sources of the NFETs connected to the sense amp enable. A bit line pre-charge is connected to each pair of complementary bit lines. The bit line pre-charge is connected between the complementary bit line pair and a reference voltage. A test control circuit selectively holds the sense amp disabled and the bit line pairs in a pre-charge state in response to a test control signal. An active sense amp load connected between the sense amp and a load enable latches data in the sense amp. The active sense amp load is a pair of cross coupled PFETs 172, 174 connected to the sense amp with the sources of the PFETs connected to the load enable. Optionally, each column may include a plurality of bit line pairs, each pair connected to a mux 164 input. In this embodiment, the sense amp is connected between the mux output and the sense amp enable. Because the control circuit uses the equalization voltage to disable the sense amp, cell signal margin may be tested in a new way. Instead of varying the sense amp reference voltage, the voltage stored in the cells is varied, so that cell signal margin is tested by varying cell signal, which may be selected to determine both a high and a low signal margin.
摘要:
A Dynamic Random Access Memory (DRAM) includes an array of memory cells 160 arranged in rows and columns, a word line in each row responsive to a row address and, a pair of complementary bit lines in each column. The DRAM also includes a sense amp 166 in each column connected between a sense enable and the pair of complementary bit lines. The sense amp is a pair of cross coupled NFETs 168, 170, with the sources of the NFETs connected to the sense amp enable. A bit line pre-charge is connected to each pair of complementary bit lines. The bit line pre-charge is connected between the complementary bit line pair and a reference voltage. A test control circuit selectively holds the sense amp disabled and the bit line pairs in a pre-charge state in response to a test control signal. An active sense amp load connected between the sense amp and a load enable latches data in the sense amp. The active sense amp load is a pair of cross coupled PFETs 172, 174 connected to the sense amp with the sources of the PFETs connected to the load enable. Optionally, each column may include a plurality of bit line pairs, each pair connected to a mux 164 input. In this embodiment, the sense amp is connected between the mux output and the sense amp enable. Because the control circuit uses the equalization voltage to disable the sense amp, cell signal margin may be tested in a new way. Instead of varying the sense amp reference voltage, the voltage stored in the cells is varied, so that cell signal margin is tested by varying cell signal, which may be selected to determine both a high and a low signal margin.
摘要:
A deep trench type DRAM cell with shallow trench isolation has a buried polysilicon strap that is defined without the use of a separate mask by depositing the strap material over at least the deep trench before shallow trench definition and using the shallow trench isolation mask to overlap partially the deep trench, thereby defining the strap during the process of cutting the shallow trench.
摘要:
An improved method for isolating electrical conductors which are positioned over each other is disclosed. These conductors would normally contact each other because of the somewhat imprecise patterning and etching steps used to fabricate a multitude of conductive elements, e.g., in a very dense semiconductor structure. The method involves forming a recess in the upper surface of the lower conductor, and then at least partially filling the recess with an oxide-type material. This method is particularly valuable in the construction of stacked capacitor cells. Cells prepared using this technique also form part of this invention.
摘要:
An interconnection array layout and method are provided for a plurality of paired line conductors of a given length extending principally parallel. A single crossing region traverses the paired line conductors intermediate the given length, wherein the line conductors of each pair of line conductors cross such that inter-pair capacitive coupling is matched. Intra-pair capacitive coupling is avoided by separating the line conductors of each pair of line conductors by two pitches and disposing therebetween a line conductor of a different pair of line conductors. Applications include semiconductor memory arrays, such as DRAM structures, and address/data busses wherein paired true/complement line conductors are employed.