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公开(公告)号：EP1516228B1
公开(公告)日：2009-03-18
申请号：EP03727822.3
申请日：2003-05-28
IPC分类号： G03F7/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S438/975
摘要： The invention relates to a method for creating a pattern on a substrate comprising a first alignment structure, using an elastomeric stamp comprising a patterning structure and a second alignment structure. The method comprises a moving step for moving the elastomeric stamp towards the substrate, and a deformation step for deforming the patterning structure with a tensile force generated by cooperation of the first alignment structure and the second alignment structure.
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公开(公告)号：EP1371061B1
公开(公告)日：2005-02-02
申请号：EP02703812.4
申请日：2002-03-14
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B25/06 , G11B25/063
摘要： In accordance with the present invention, there is provided an apparatus comprising a tape having an information layer on which information is storable in the form of perturbations, an array (10) of probes (11) that in function faces the tape (2) such that the probes scan the surface of the tape, means for selectively forming the perturbations via the probes, means for detecting the presence of the perturbations via the probes, and drive means (20, 25, 40, 42) for moving the tape relative to the array of probes. The apparatus allows to store high data capacities at a small form factor.
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3.发明授权MECHANICAL SIGNAL PROCESSOR BASED ON MICROMECHANICAL OSCILLATORS AND INTELLIGENT ACOUSTIC DETECTORS AND SYSTEMS BASED THEREON 失效基于微机械振荡器和智能声波探测仪，并应机械信号处理器构建的系统
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公开(公告)号：EP1466333B1
公开(公告)日：2011-06-22
申请号：EP02781555.4
申请日：2002-11-21
发明人： CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
IPC分类号： G01B7/34
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.
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公开(公告)号：EP1578686A2
公开(公告)日：2005-09-28
申请号：EP03811019.3
申请日：2003-11-07
发明人： POGGE, Bernhard , DESPONT, Michel , DRECHSLER, Ute , PRASAD, Chandrika , VETTIGER, Peter , YU, Roy
IPC分类号： B81C3/00
CPC分类号： B81C1/00238 , B81B2203/0307 , H01L21/76898 , H01L2224/16225
摘要： A vertically integrated structure includes a micro-electromechanical system (MEMS) and a chip for delivering signals to the MEMS. The MEMS has an anchor portion having a conductor therethrough, by which it is connected to a substrate. The chip is attached to the MEMS substrate in a direction normal to the substrate surface, so as to make a conductive path from the chip to the MEMS. The chip may be attached by bonding the conductor to C4 metal pads formed on the chip, or by bonding the conductor to metal studs on the chip. The MEMS substrate may be thinned before attachment to the chip, or may be removed from the underside of the MEMS. A temporary carrier plate is used to facilitate handling of the MEMS and alignment to the chip.
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公开(公告)号：EP1449210A2
公开(公告)日：2004-08-25
申请号：EP02745730.8
申请日：2002-07-19
发明人： BÄCHTOLD, Peter , BINNIG, Gerd, K. , CHERUBINI, Giovanni , DHOLAKIA, Ajay , DÜRIG, Urs, T. , ELEFTHERIOU, Evangelos, S. , LOELIGER, Theodor, W. , VETTIGER, Peter
CPC分类号： B82Y10/00 , G11B9/04 , G11B9/14 , G11B20/18 , G11B2005/0021
摘要： Apparatus for detecting data in a sensor signal generated by a read sensor (10) in a local probe data storage device comprises a differentiation (110) for subtracting a value of the sensor signal from the succeeding value of the sensor signal to generate a ternary difference signal ; and a convertor (120) connected to the differentiator for converting the difference signal into a binary output signal indicative of the detected data. A local probe data storage device comprising such apparatus is also described.
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公开(公告)号：EP1449210B1
公开(公告)日：2005-02-23
申请号：EP02745730.8
申请日：2002-07-19
发明人： BÄCHTOLD, Peter , BINNIG, Gerd, K. , CHERUBINI, Giovanni , DHOLAKIA, Ajay , DÜRIG, Urs, T. , ELEFTHERIOU, Evangelos, S. , LOELIGER, Theodor, W. , VETTIGER, Peter
CPC分类号： B82Y10/00 , G11B9/04 , G11B9/14 , G11B20/18 , G11B2005/0021
摘要： Apparatus for detecting data in a sensor signal generated by a read sensor (10) in a local probe data storage device comprises a differentiation (110) for subtracting a value of the sensor signal from the succeeding value of the sensor signal to generate a ternary difference signal ; and a convertor (120) connected to the differentiator for converting the difference signal into a binary output signal indicative of the detected data. A local probe data storage device comprising such apparatus is also described.
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公开(公告)号：EP1466333A1
公开(公告)日：2004-10-13
申请号：EP02781555.4
申请日：2002-11-21
发明人： CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.
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公开(公告)号：EP1371062A2
公开(公告)日：2003-12-17
申请号：EP02707044.0
申请日：2002-03-15
CPC分类号： B82Y10/00 , G11B9/14 , G11B11/007 , G11B13/00
摘要： A method for writing data to and/or reading data from locations on a surface (90) via a tip (40) comprises moving the tip between the locations on the surface. At each location, energy (250) is selectively applied to the surface via the tip and the tip and the surface are selectively forced together in synchronization with the application of energy.
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公开(公告)号：EP0783748B1
公开(公告)日：2001-11-21
申请号：EP95925091.1
申请日：1995-07-28
摘要： The present invention concerns a storage device comprising a local probe array (72) and a storage medium (70) with an array of storage fields (71). The local probe array (72) is situated opposite to said storage medium (70) such that each local probe (73) of the local probe array can be scanned over the corresponding storage field (31, 40, 71). The storage device further comprises means (RF, 44; CF, 45) for distinguishing between information (41) to be erased from a first section of the storage medium and information in this section which is not to be erased, means for selectively copying said information which is not to be erased into a memory, preferably another section (32) of said medium, and means for erasing the whole first section.
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