公开(公告)号：EP2696211A4

公开(公告)日：2015-06-10

申请号：EP12767908

申请日：2012-04-01

申请人： JIANGSU MULTIDIMENSION TECH CO

发明人： LEI XIAOFENG ,  JIN INSIK ,  DEAK JAMES GEZA ,  SHEN WEIFENG ,  LIU MINGFENG ,  XUE SONGSHENG

IPC分类号： G01R33/09 ,  G01B7/30 ,  G01D5/16 ,  G01R33/00 ,  G01R33/02 ,  H01L43/02 ,  H01L43/08

CPC分类号： H01L43/12 ,  B82Y10/00 ,  G01B7/30 ,  G01R33/0052 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3909 ,  G11B5/3993 ,  G11B2005/3996 ,  H01L43/02 ,  H01L43/08

摘要： The present invention discloses a design and manufacturing method for a single-chip magnetic sensor bridge. The sensor bridge comprises four magnetoresistive elements. The magnetization of the pinned layer of each of the four magnetoresistive elements is set in the same direction, but the magnetization directions of the free layers of the magnetoresistive elements on adjacent arms of the bridge are set at different angles with respect to the pinned layer magnetization direction. The absolute values of the angles of the magnetization directions of the free layers of all four magnetoresistive elements are the same with respect with their pinning layers. The disclosed magnetic biasing scheme enables the integration of a push-pull Wheatstone bridge magnetic field sensor on a single chip with better performance, lower cost, and easier manufacturability than conventional magnetoresistive sensor designs.