公开(公告)号：EP2847781A4

公开(公告)日：2015-12-09

申请号：EP13788136

申请日：2013-05-07

Applicant: KLA TENCOR CORP

Inventor： NASSER-GHODSI MEHRAN ,  PLETTNER TOMAS ,  HAYNES ROBERT G ,  SEARS CHRISTOPHER MALCOLM STANLEY

IPC: H01J3/02 ,  H01J37/065 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J3/027 ,  H01J3/029 ,  H01J27/024 ,  H01J37/063 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/06375

Abstract: One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The electron further includes a non-planar extractor with an extractor opening and a built-in beam-limiting aperture. The extractor opening is larger than the beam-limiting aperture, and central axes of both the extractor opening and the beam-limiting aperture are aligned with the tip along a beam axis. Another embodiment relates to a method of generating an electron beam using an electron source having a non-planar extractor. Another embodiment relates to an array of electron sources for generating an array of electron beams. The array of electron sources includes an array of electron emitters and an array of non-planar extractor structures. Other embodiments, aspects and features are also disclosed.

公开(公告)号：EP3047502A4

公开(公告)日：2017-09-20

申请号：EP14846116

申请日：2014-09-16

Applicant: KLA-TENCOR CORP

Inventor： PLETTNER TOMAS ,  GERLING JOHN

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/304

CPC classification number: H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/2482

Abstract: An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 放置在非相对论带电粒子束的设计轨迹附近的电磁尾场检测器响应于带电粒子束的通过产生光信号而不中断带电粒子束。 光子检测器接收光信号并产生相应的输出。 尾场检测器可以基于电光效应。 具体而言，检测器可以测量带电粒子束对辐射束的影响，该辐射束在与附近电光波导中的束平行地传播的辐射的相位上。 提供此摘要是为了遵守要求摘要的规则，该摘要将允许搜索者或其他读者快速确定技术公开的主题。 提交时的理解是，它不会被用来解释或限制权利要求的范围或含义。

公开(公告)号：EP3042387A4

公开(公告)日：2017-05-03

申请号：EP14842291

申请日：2014-09-04

Applicant: KLA - TENCOR CORP

Inventor： GERLING JOHN ,  PLETTNER TOMAS ,  NASSER-GHODSI MEHRAN

IPC: H01J37/26

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/28