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    NON-PLANAR EXTRACTOR STRUCTURE FOR ELECTRON SOURCE
    4.
    发明公开
    NON-PLANAR EXTRACTOR STRUCTURE FOR ELECTRON SOURCE 有权
    电子源的非平面抽出器结构

    公开(公告)号：EP2847781A1

    公开(公告)日：2015-03-18

    申请号：EP13788136.3

    申请日：2013-05-07

    Applicant: Kla-Tencor Corporation

    Inventor： NASSER-GHODSI, Mehran ,  PLETTNER, Tomas ,  HAYNES, Robert G. ,  SEARS, Christopher Malcolm Stanley

    IPC: H01J37/06

    CPC classification number: H01J37/04 ,  H01J3/027 ,  H01J3/029 ,  H01J27/024 ,  H01J37/063 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/06375

    Abstract: One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The electron further includes a non-planar extractor with an extractor opening and a built-in beam-limiting aperture. The extractor opening is larger than the beam-limiting aperture, and central axes of both the extractor opening and the beam-limiting aperture are aligned with the tip along a beam axis. Another embodiment relates to a method of generating an electron beam using an electron source having a non-planar extractor. Another embodiment relates to an array of electron sources for generating an array of electron beams. The array of electron sources includes an array of electron emitters and an array of non-planar extractor structures. Other embodiments, aspects and features are also disclosed.

    Abstract translation: 所公开的一个实施例涉及用于产生电子束的电子源。 电子源包括具有提取电子束的尖端的电子发射器。 该电子还包括具有抽取器开口和内置光束限制孔的非平面抽取器。 提取器开口大于限光孔，并且提取器开口和限光孔两者的中心轴与沿光束轴的尖端对齐。 另一个实施例涉及使用具有非平面提取器的电子源来产生电子束的方法。 另一个实施例涉及用于产生电子束阵列的电子源阵列。 电子源阵列包括电子发射器阵列和非平面抽取器结构阵列。 其他实施例，方面和特征也被公开。

    ELECTRON BEAM ACCELERATOR
    5.
    发明授权
    ELECTRON BEAM ACCELERATOR 失效
    电子加速器

    公开(公告)号：EP0950256B1

    公开(公告)日：2010-11-24

    申请号：EP97954262.8

    申请日：1997-12-30

    Applicant: Advanced Electron Beams, Inc.

    Inventor： AVNERY, Tzvi

    IPC: H01J33/00 ,  H01J3/02

    CPC classification number: H01J33/02 ,  H01J3/027 ,  H01J33/00

    Abstract: An electron accelerator (10) includes a vacuum chamber (46) having an electron beam exit window (24). An electron generator (31) is positioned within the vacuum chamber for generating electrons. A housing (30) surrounds the electron generator and has a first series of openings (34) formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window. The housing also has a second series and third series of openings (35) formed in the housing on opposite sides of the electron generator for causing electrons to be uniformly distributed across the electron beam by flattening electrical field lines between the electron generator and the exit window.

    Charged particle source with integrated energy filter
    6.
    发明公开
    Charged particle source with integrated energy filter 有权
    带集成能量过滤器的带电粒子源

    公开(公告)号：EP2128886A1

    公开(公告)日：2009-12-02

    申请号：EP09160973.5

    申请日：2009-05-25

    Applicant: FEI Company

    Inventor： Henstra, Alexander

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/153 ,  H01J37/04

    CPC classification number: H01J37/05 ,  H01J3/027 ,  H01J3/04 ,  H01J37/063 ,  H01J2237/045 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/15 ,  H01J2237/1534

    Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current.
    The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector 112 is avoided.

    Abstract translation: 本发明描述了发生能量选择的粒子源。 能量选择通过透过透镜107偏心地发送一束带电粒子103来发生。其结果是，能量分散将发生在由透镜形成的图像中。 通过将该图像投影到能量选择膜片108中的狭缝109上，可以仅允许能量谱的有限部分中的粒子通过。 结果，通过的光束113将具有降低的能量分布。 偏转单元112将光束偏转到光轴101.也可以选择将穿过透镜中间的光束105朝向光轴偏转并且具有例如更大的电流。 能量色散斑点由偏转器111在狭缝上成像。当将能量色散斑点定位在狭缝上时，中心光束105从轴偏转到被能量选择光阑停止的程度。 因此避免了在隔膜之后的区域中由该射束引起的反射和污染。 还避免了来自中心束的电子与偏转器112的区域中的能量滤波束相互作用所导致的电子 - 电子相互作用。

    Kathodenstrahlröhre
    9.
    发明公开
    Kathodenstrahlröhre 失效

    公开(公告)号：EP0763846A2

    公开(公告)日：1997-03-19

    申请号：EP96114110.8

    申请日：1996-09-04

    Applicant: Licentia Patent-Verwaltungs-GmbH

    Inventor： Gassler, Gerhard, Dr.rer.nat. ,  Hörsch, Gerhard, Dr.rer.nat.

    IPC: H01J29/48 ,  H01J3/02

    CPC classification number: H01J29/485 ,  H01J3/027

    Abstract: Für eine Kathodenstrahlröhre mit mindestens einer Gitterelektrode mit einer Blendenöffnung wird vorgeschlagen, die Gitterelektrode aus einem nichtleitendem Trägerkörper vorzugsweise einer keramischen Folie, mit einer metallisierten Fläche im Bereich der Blendenöffnung aufzubauen. Hierdurch kann die Gitterkapazität gegenüber einer metallischen Gitterelektrode verringert und die Grenzfrequenz der Strahlmodulation erhöht werden.

    Abstract translation: 阴极射线管具有至少一个具有止动开口（B2）和陶瓷载体（T2）的栅电极。 陶瓷载体由陶瓷箔制成，箔厚小于0.5mm。 箔片在止动开口附近具有金属化表面。 金属化表面延伸到止动开口的壁中。 横向于辐射方向的金属化表面的直径小于止动开口直径的20倍，例如， 在2到10次之间。

    Electron gun arrangements
    10.
    发明公开
    Electron gun arrangements 失效
    Elektronenstrahlerzeugungsvorrichtungen。

    公开(公告)号：EP0589606A3

    公开(公告)日：1995-02-01

    申请号：EP93307233.2

    申请日：1993-09-14

    Applicant: EEV LIMITED

    Inventor： Arnold, Barry James ,  Shakespeare, Brian Alfred Henry

    IPC: H01J23/065 ,  H01J25/34 ,  H01J1/88 ,  H01J3/02

    CPC classification number: H01J23/065 ,  H01J3/027

    Abstract: An electron gun arrangement which is particularly suitable for use in travelling wave tubes includes a substantially cylindrical ceramic body (20) which partly defines a vacuum envelope. The body (20) surrounds an electrode assembly constituted by cathode (21), grids (22,23 and 24) and an anode (25). The leads to the grids and cathode are extensive in a generally longitudinal axial direction at the end of the body (20) remote from the anode (25), electrical connection being made via pins (30-33) and metallised apertures (26-29) extensive longitudinally through the wall of the body (20). The internal diameter of the body (20) may be stepped to define ridges (38-40) to which supports for parts of the electrode assembly are fixed.

    Abstract translation: 特别适用于行波管的电子枪装置包括部分限定真空外壳的大致圆柱形的陶瓷体20。 主体20围绕由阴极21，栅极22,23和24以及阳极25构成的电极组件。栅极和阴极的导体在远离阳极25的主体20的端部处大致纵向轴向方向上是广泛的 ，电连接通过销和金属化孔径纵向穿过主体的壁进行。 主体的内径可以是阶梯形的，以限定脊部，电极组件的部件的支撑件固定到脊部。

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