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1.NOVEL OXIMESTER FLUORINE COMPOUND, AND PHOTOPOLYMERIZATION INITIATOR AND PHOTORESIST COMPOSITION COMPRISING SAME 有权
标题翻译: 新型OXIMESTERFLUOR连接和光聚合引发剂和PHOTOLACK组合公开(公告)号:EP2845845A4
公开(公告)日:2015-12-09
申请号:EP13785166
申请日:2013-05-03
发明人: SHIN SEUNG RIM , JUN KUN , SHIN JONG IL , PARK SOO YOUL , AN KYOUNG LYONG , LEE SANG OH , MOON BONG SEOK , OH CHUNRIM , CHOI ANAM , SO IN-YOUNG
IPC分类号: G03F7/004 , C07C13/567 , C07C251/66 , C07C251/68 , G03F7/027 , G03F7/031 , G03F7/105
CPC分类号: G03F7/027 , C07C251/66 , C07C251/68 , C07C2603/18 , G03F7/0007 , G03F7/031 , G03F7/105
摘要: Provided are a novel fluorene oxime ester compound, and a photopolymerization initiator and a photoresist composition containing the same.