摘要:
The present invention aims to provide a high-quality charge stripping film for a charge stripping device of ion beam, that has high heat resistance and high thermal conductivity, and that has high quality to the degree of withstanding a beam irradiation over a long period of time. The present invention is a charge stripping film for a charge stripping device of ion beam, wherein the charge stripping film is a carbon film produced by a polymer annealing method, and has a film thickness of not less than 10 µ m and not more than 150 µ m. The present invention comprises a charge stripping film for a charge stripping device of ion beam, wherein the charge stripping film is a carbon film having a thermal conductivity in a film surface direction at 25° C of not less than 300 W/mK, and has a film thickness of not less than 10 µ m and not more than 150 µ m. These stripping films preferably have a density of not less than 0.90 g/cm 3 and not more than 2.26 g/cm 3 , a weight per unit area of not less than 1.5 mg/cm 2 and not more than 30 mg/cm 2 , or an area of not less than 4 cm 2 .
摘要翻译:本发明的目的在于提供一种用于离子束电荷剥离装置的高质量的充电剥离膜,其具有高耐热性和高导热性,并且在长时间耐受束照射的程度上具有高质量。 时间。 本发明是用于离子束的电荷剥离装置的电荷剥离膜,其中电荷剥离膜是通过聚合物退火法制造的碳膜,并且具有不小于10μm且不大于150μm的膜厚度 。 本发明包括用于离子束的电荷剥离装置的电荷剥离膜,其中该电荷剥离膜是在25℃下在膜表面方向上的热导率不小于300W / mK的碳膜,并且具有 膜厚不小于10μm且不大于150μm。 这些剥离膜的密度优选为不小于0.90g / cm 3且不大于2.26g / cm 3,单位面积重量不小于1.5mg / cm 2且不大于30mg / cm 2,或者面积 不小于4平方厘米。
摘要:
An object of the present invention is to provide a charge stripping film in a charge stripping device of an ion beam, which has high heat resistance and no toxicity, with which there is no risk of activation, with which an ion beam can be made multivalent even if the charge stripping film is thin, and which is resistant to high-energy beam radiation over an extended period of time. The present invention comprises a charge stripping film used in a device which strips a charge of an ion beam, wherein the charge stripping film is a rotary charge stripping film comprising a carbon film having a thermal conductivity of 20 W/mK or more in a film surface direction at 25°C, and a film thickness of the carbon film is more than 3 µ m and less than 10 µ m. The present invention also comprises a charge stripping film used in a device which strips a charge of an ion beam, wherein the charge stripping film is a rotary charge stripping film comprising a carbon film produced by a polymer annealing method, and a film thickness of the carbon film is more than 3 µ m and less than 10 µ m.
摘要:
An object of the present invention is to provide a thermal interface material made of a graphite film having excellent thermal resistance even when interposed between materials having unevenness, and a method for preparing the thermal interface material. The above object is solved by the thermal interface material containing a graphite film and a fluid substance, wherein the graphite film has a thickness of 100 nm to 15 µm, a density of 1.20 g/cm 3 to 2.26 g/cm 3 , a thermal conductivity of 500 W/mK to 2000 W/mK in a film plane direction, and a weight ratio of the fluid substance to the graphite film is 0.08 to 25.
摘要:
An electrode composite body including a conductive polymer film in which the doping and dedoping capacities of the conductive polymer are improved, an electrolyte, and a redox capacitor including those are provided. The object is achieved by the followings: (1) an electrode composite body including a conductive polymer and an electrode for redox capacitors; (2) an electrode composite including a conductive polymer film and an electrode body for redox capacitors; (3) an electrolyte for redox capacitors that contains an ionic liquid as an essential component; (4) a redox capacitor composed of an electrolyte containing an ionic liquid as an essential component and an electrode composite body for redox capacitors; and (5) a composite body in which the anionic component contained in the ionic liquid and is the same component as a part of the dopant of the conductive polymer.
摘要:
A process for producing a filmy graphite includes the steps of forming a polyimide film having a birefringence of 0.12 or more and heat-treating the polyimide film at 2,400°C or higher.
摘要:
The present invention provides means for forming an oxide film on a metal surface, means for repairing a defect of an oxide film, a high-performance electrolytic capacitor using the means, and an electrolyte of the capacitor. Namely, the prevent invention provides a method for easily forming an oxide film on the surface of a metal or an alloy thereof by anodization using a solution containing an ionic liquid. In an application of this method, an electrolytic capacitor having means for repairing a defect of an oxide film can be formed by a method using, as an electrolyte, an ionic liquid, a solution containing an ionic liquid and a salt, or a solution containing an ionic liquid and a conductive polymer or a TCNQ salt, and a valve metal or an alloy thereof as a metal.
摘要:
An object of the present invention is to provide a graphite sheet for a beam sensor, which is excellent in yield when subjected to laser working. The present invention is a graphite sheet for a beam sensor characterized in that the graphite sheet has no eyeball-shaped convex portions on a surface of its a-b plane.
摘要:
The present invention contains a graphite membrane having a thickness of 10 nm to 12 µm, an area of 5 × 5 mm 2 or more, an electrical conductivity of 8000 S/cm or more, and an arithmetic average roughness Ra of 200 nm or less on the surface of the graphite membrane. It is preferable that a kind of raw material polymer is polyimide, and the heating temperature at the graphitization of the raw material film is 2600 °C or more.
摘要:
An object of the present invention is to provide a MEMS vibrator or the like that has excellent chemical resistance and an excellent mechanical strength and that is easily thinned. The present invention is a MEMS vibrator comprising: a vibrating film including a graphite film; and a silicon member supporting the vibrating film, the graphite film having a thickness of 50 nm or more and less than 20 µ m, and the graphite film having a Young's modulus along a graphite film plane direction of 700 GPa or more.