公开(公告)号：EP1358623B1

公开(公告)日：2011-03-16

申请号：EP01992140.2

申请日：2001-12-14

申请人： Kla Tencor Corporation

发明人： ADLER, David, L. ,  BERTSCHE, Kirk ,  MCCORD, Mark ,  FRIEDMAN, Stuart

IPC分类号： G01N21/956 ,  G01N23/20 ,  G03F1/00

CPC分类号： G01N23/203 ,  G01N21/956 ,  G01N21/95607 ,  G01N23/20 ,  G01N23/2251 ,  G01N23/2252 ,  G01N2223/304 ,  G01N2223/611 ,  G01N2223/646 ,  G03F1/84 ,  G03F1/86 ,  G03F7/70616 ,  G03F7/7065 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2817

摘要： A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.

公开(公告)号：EP1358623A2

公开(公告)日：2003-11-05

申请号：EP01992140.2

申请日：2001-12-14

申请人： Kla Tencor Corporation

发明人： ADLER, David, L. ,  BERTSCHE, Kirk ,  MCCORD, Mark ,  FRIEDMAN, Stuart

IPC分类号： G06K9/00

CPC分类号： G01N23/203 ,  G01N21/956 ,  G01N21/95607 ,  G01N23/20 ,  G01N23/2251 ,  G01N23/2252 ,  G01N2223/304 ,  G01N2223/611 ,  G01N2223/646 ,  G03F1/84 ,  G03F1/86 ,  G03F7/70616 ,  G03F7/7065 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2817

摘要： A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.