ROTARY POSITIONING DEVICE
    2.
    发明公开
    ROTARY POSITIONING DEVICE 有权
    旋转定位装置

    公开(公告)号:EP2904635A2

    公开(公告)日:2015-08-12

    申请号:EP13805556.1

    申请日:2013-10-05

    IPC分类号: H01L21/67 H01L21/687

    摘要: The present invention relates to a rotary positioning device (100, 100', 100'') comprising a circular magnetic track (110) generating a magnetic field across a circular air gap (113), at least three forcers (120, 121, 122), each including a plurality of coils (1201, 202, 1203) at least partly disposed with the circular air gap (113) and each being operable for generating a levitation force in a levitation direction orthogonal to the circular magnetic track and a drive force in a drive direction along the circular magnetic track, said forcers being arranged at different angular positions along said circular magnetic track, and a controller (140) for providing currents to said forcers for individually controlling the generation of a levitation force and/or a drive force by said forcers for effecting a rotational movement, and/or a tilting movement and/or a translational movement of said circular magnetic track.