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1.发明公开CORDIERITE SINTERED BODY AND MEMBER FOR SEMICONDUCTOR DEVICE COMPOSED OF CORDIERITE SINTERED BODY 有权CORDIERIT-SINTERKÖRPERUND ELEMENTFÜREINE AUS CORDIERIT-SINTERKÖRPERNZUSAMMUSTRETZTE HALBLEITERVORRICHTUNG
公开(公告)号：EP2679562A1
公开(公告)日：2014-01-01
申请号：EP12749386.4
申请日：2012-02-22
Applicant: Kyocera Corporation
Inventor： FURUSE,Tatsuji , SENO,Hiroaki , IIDA,Shuichi , OKAYAMA,Kouki , SHIGEOKA,Toshiaki
IPC: C04B35/195 , H01L21/677
CPC classification number: C04B35/195 , C04B35/185 , C04B35/62685 , C04B35/62695 , C04B35/6455 , C04B2235/3206 , C04B2235/3208 , C04B2235/3217 , C04B2235/3243 , C04B2235/3244 , C04B2235/3262 , C04B2235/3418 , C04B2235/3463 , C04B2235/3481 , C04B2235/5436 , C04B2235/77 , C04B2235/80 , C04B2235/85 , C04B2235/96 , C04B2235/9607 , C04B2235/9661 , C04B2235/9692
Abstract: [Problem] To provide a cordierite sintered body having a low coefficient of thermal expansion and high specific rigidity (=Young's modulus/specific gravity) and mechanical strength, and to provide a member for a semiconductor device composed of this cordierite sintered body. [Solution] This cordierite sintered body has a major crystalline phase of cordierite and contains alumina, mullite, and sapphirine as a secondary crystalline phase, an amorphous phase containing Ca being present at the grain boundary. The crystalline phase ratio of the major crystalline phase is 95-97.5 mass%. The crystalline phase ratio of the secondary crystalline phase is 2.5-5 mass%. The Ca content relative to the total, in terms of CaO, is 0.4-0.6 mass%.
Abstract translation: [问题]提供一种具有低热膨胀系数和高比刚度（=杨氏模量/比重）和机械强度的堇青石烧结体，并提供由该堇青石烧结体构成的半导体器件的部件。 [解决方案]该堇青石烧结体具有主要的堇青石结晶相，并含有作为二次结晶相的氧化铝，莫来石和蓝宝石，在晶界存在Ca的非晶相。 主晶相的结晶相比为95-97.5质量％。 二次结晶相的结晶相比为2.5-5质量％。 以CaO计，相对于总量的Ca含量为0.4〜0.6质量％。
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2.发明授权CORDIERITE SINTERED BODY AND MEMBER FOR SEMICONDUCTOR DEVICE COMPOSED OF CORDIERITE SINTERED BODY 有权堇青石烧结体及元在关 - 堇青石烧结BODIES复合型半导体装置
公开(公告)号：EP2679562B1
公开(公告)日：2017-03-29
申请号：EP12749386.4
申请日：2012-02-22
Applicant: Kyocera Corporation
Inventor： FURUSE,Tatsuji , SENO,Hiroaki , IIDA,Shuichi , OKAYAMA,Kouki , SHIGEOKA,Toshiaki
IPC: C04B35/195 , H01L21/677
CPC classification number: C04B35/195 , C04B35/185 , C04B35/62685 , C04B35/62695 , C04B35/6455 , C04B2235/3206 , C04B2235/3208 , C04B2235/3217 , C04B2235/3243 , C04B2235/3244 , C04B2235/3262 , C04B2235/3418 , C04B2235/3463 , C04B2235/3481 , C04B2235/5436 , C04B2235/77 , C04B2235/80 , C04B2235/85 , C04B2235/96 , C04B2235/9607 , C04B2235/9661 , C04B2235/9692
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