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公开(公告)号：EP1678480A4
公开(公告)日：2012-10-17
申请号：EP04795935
申请日：2004-10-20
Applicant: LAM RES CORP
Inventor： MCMILLIN BRIAN K , DASSAPA FRANCOIS CHANDRASEKAR
CPC classification number: G01N21/68 , G01J3/02 , G01J3/0229 , G01J3/443 , H01J37/32963
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