公开(公告)号：EP1632006A4

公开(公告)日：2008-11-26

申请号：EP04710690

申请日：2004-02-12

申请人： LAM RES CORP

发明人： WILCOXSON MARK H ,  BAILEY ANDREW D III

IPC分类号： H01J7/24 ,  H01J37/32 ,  H01Q1/36 ,  H01Q7/00

CPC分类号： H01J37/32467 ,  H01J37/321 ,  H01Q1/36 ,  H01Q7/00

摘要： An antenna arrangement (210) for generating an electric field inside a process chamber (202) through a window (212). Generally, the antenna arrangement (210) comprises an outer loop (610), comprising a first outer loop turn (618) disposed around an antenna axis (614), an inner loop (606), comprising a first inner loop turn (616) disposed around the antenna axis (614), wherein the inner loop (606) is closer to the antenna axis (614) than the outer loop (610) is to the antenna axis (614) in each azimuthal direction, and a radial connector (640) radially electrically connecting the outer loop (610) to the inner loop (606), wherein the radial connector (640) is placed a large distance from the window (212).