专利检索 ap:("LAM RES CORP") AND inv:"BAILEY ANDREW D III" 第 1 页

1.

发明公开
SYSTEM, METHOD AND APPARATUS FOR IMPROVED LOCAL DUAL-DAMASCENE PLANARIZATION 审中-公开
标题翻译：系统，方法和设备改进局部双镶嵌平面化

公开(公告)号：EP1611599A4

公开(公告)日：2007-06-13

申请号：EP04719319

申请日：2004-03-10

申请人： LAM RES CORP

发明人： LOHOKARE SHRIKANT P , BAILEY ANDREW D III , HEMKER DAVID , COOK JOEL M

IPC分类号： H01L21/321 , H01L21/3105 , H01L21/3213 , H01L21/768

CPC分类号： H01L21/32135 , H01L21/32115 , H01L21/32136 , H01L21/7684

摘要： A system and method for planarizing a patterned semiconductor substrate includes receiving a patterned semiconductor substrate. The patterned semiconductor substrate having a conductive interconnect material filling multiple of features in the pattern. The conductive interconnect material having an overburden portion. The overburden portion includes a localized non-uniformity. An additional layer is formed an the overburden portion. The additional layer and the overburden portion are planarized. The planarizing process substantially entirely removes the additional layer.

2.

发明公开
SYSTEM, METHOD AND APPARATUS FOR IMPROVED GLOBAL DUAL-DAMASCENE PLANARIZATION 审中-公开
标题翻译：系统，方法和设备改进的全局双镶嵌平面化

公开(公告)号：EP1604393A4

公开(公告)日：2009-11-11

申请号：EP04719313

申请日：2004-03-10

申请人： LAM RES CORP

发明人： LOHOKARE SHRIKANT P , BAILEY ANDREW D III , HEMKER DAVID , COOK JOEL M

IPC分类号： B44C1/22 , H01L20060101 , H01L21/302 , H01L21/304 , H01L21/311 , H01L21/321 , H01L21/3213 , H01L21/4763 , H01L21/768 , H01L33/00

CPC分类号： H01L21/7684 , H01L21/31116 , H01L21/32115 , H01L21/32135 , H01L21/32136

3.

发明公开
ANTENNA FOR PRODUCING UNIFORM PROCESS RATES 有权
标题翻译：天线用于生产同样的过程速率已经整形

公开(公告)号：EP1632006A4

公开(公告)日：2008-11-26

申请号：EP04710690

申请日：2004-02-12

申请人： LAM RES CORP

发明人： WILCOXSON MARK H , BAILEY ANDREW D III

IPC分类号： H01J7/24 , H01J37/32 , H01Q1/36 , H01Q7/00

CPC分类号： H01J37/32467 , H01J37/321 , H01Q1/36 , H01Q7/00

摘要： An antenna arrangement (210) for generating an electric field inside a process chamber (202) through a window (212). Generally, the antenna arrangement (210) comprises an outer loop (610), comprising a first outer loop turn (618) disposed around an antenna axis (614), an inner loop (606), comprising a first inner loop turn (616) disposed around the antenna axis (614), wherein the inner loop (606) is closer to the antenna axis (614) than the outer loop (610) is to the antenna axis (614) in each azimuthal direction, and a radial connector (640) radially electrically connecting the outer loop (610) to the inner loop (606), wherein the radial connector (640) is placed a large distance from the window (212).