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    Surface texture measuring probe and microscope utilizing the same
    2.
    发明公开
    Surface texture measuring probe and microscope utilizing the same 有权
    探测表面纹理和相同的使用显微镜。

    公开(公告)号：EP1653478A3

    公开(公告)日：2006-09-06

    申请号：EP05023874.0

    申请日：2005-11-02

    申请人： MITUTOYO CORPORATION

    发明人： Hidaka, Kazuhiko

    IPC分类号： G01N13/14 ,  G12B21/22

    CPC分类号： G01Q60/38 ,  G01Q60/22 ,  G01Q70/04

    摘要： A surface texture measuring probe (60) includes a probe head (65), a first supporting body (61), a second supporting body (62), a piezoelectric element (63) and a balancer (64). The first supporting body includes a first supporter (611) having an inner space, and a plurality of beams (613) respectively extending from equiangular arrangement positions of the first supporter toward the center and supporting the probe head (65) at the tip end thereof. The second supporting body (62) includes a second supporter (621) and a holder (622) supported by a plurality of beams (623) respectively extending from equiangular arrangement positions of the second supporter towards the center. The piezoelectric element (63) is disposed between the probe head and the holder, and formed to vibrate in an axial direction.

    Surface texture measuring probe and microscope utilizing the same
    3.
    发明公开
    Surface texture measuring probe and microscope utilizing the same 有权
    表面纹理测量探头和利用它的显微镜

    公开(公告)号：EP1653478A2

    公开(公告)日：2006-05-03

    申请号：EP05023874.0

    申请日：2005-11-02

    申请人： MITUTOYO CORPORATION

    发明人： Hidaka, Kazuhiko

    IPC分类号： G12B21/22

    CPC分类号： G01Q60/38 ,  G01Q60/22 ,  G01Q70/04

    摘要： A surface texture measuring probe (60) includes a probe head (65), a first supporting body (61), a second supporting body (62), a piezoelectric element (63) and a balancer (64). The first supporting body includes a first supporter (611) having an inner space, and a plurality of beams (613) respectively extending from equiangular arrangement positions of the first supporter toward the center and supporting the probe head (65) at the tip end thereof. The second supporting body (62) includes a second supporter (621) and a holder (622) supported by a plurality of beams (623) respectively extending from equiangular arrangement positions of the second supporter towards the center. The piezoelectric element (63) is disposed between the probe head and the holder, and formed to vibrate in an axial direction.

    摘要翻译： 表面构造测量探头60包括探头65，第一支撑体61，第二支撑体62，压电元件63和平衡器64。 第一支撑体包括具有内部空间的第一支撑件（611）以及分别从第一支撑件的等角度布置位置朝向中心延伸并且在其末端处支撑探头（65）的多个梁（613） 。 第二支撑体62包括第二支撑件621和由分别从第二支撑件的等角度布置位置朝向中心延伸的多个梁623支撑的支架622。 压电元件（63）配置在探头与保持件之间，形成为沿轴向振动。

    MEASURING PROBE
    4.
    发明授权
    MEASURING PROBE 有权
    测量探针

    公开(公告)号：EP3064890B1

    公开(公告)日：2017-10-04

    申请号：EP15175249.0

    申请日：2015-07-03

    申请人： Mitutoyo Corporation

    发明人： Shimaoka, Atsushi ,  Miyazaki, Tomoyuki ,  Hidaka, Kazuhiko

    IPC分类号： G01B5/00 ,  G01B5/012

    CPC分类号： G01B11/2441 ,  G01B5/0016 ,  G01B5/012 ,  G01B11/007 ,  G01B11/14

    摘要： A measuring probe (300) includes a stylus(306) having a contact part(348) to be in contact with an object(W) to be measured, an axial motion mechanism(310) having a moving member(312) that allows the contact part(348) to move in an axial direction(O), and a rotary motion mechanism(334) having a rotating member(RP) that allows the contact part(348) to move along a plane perpendicular to the axial direction(O) by means of rotary motion. The measuring probe (300) includes a main body housing(308) that supports the axial motion mechanism(310), a module housing(330) that supports the rotary motion mechanism(334), and a displacement detector(328) supported by the main body housing(308) for detecting displacement of the moving member(312). The measuring probe (300) with this configuration ensures high measurement accuracy while keeping a low cost.

    摘要翻译： 测量探针（300）包括具有与要测量的物体（W）接触的接触部分（348）的触针（306），具有移动部件（312）的轴向移动机构（310） （34）沿轴向（O）移动;以及旋转运动机构（334），其具有允许所述接触部（348）沿垂直于所述轴向（O）的平面移动的旋转部件（RP） ）通过旋转运动。 测量探头300包括支撑轴向运动机构310的主体外壳308，支撑旋转运动机构334的模块外壳330以及由该外壳支撑的位移检测器328， 主体外壳（308），用于检测移动部件（312）的位移。 具有这种结构的测量探头（300）确保了高测量精度，同时保持了低成本。

    Form measuring instrument
    9.
    发明公开
    Form measuring instrument 有权
    Formmessinstrument

    公开(公告)号：EP2772722A1

    公开(公告)日：2014-09-03

    申请号：EP14000622.2

    申请日：2014-02-21

    申请人： Mitutoyo Corporation

    发明人： Matsumiya, Sadayuki ,  Hidaka, Kazuhiko

    IPC分类号： G01B3/00 ,  G01B5/20 ,  G01B5/28 ,  G01B7/28 ,  G01B7/34

    CPC分类号： G01B5/20 ,  G01B3/008 ,  G01B5/28 ,  G01B7/28 ,  G01B7/34

    摘要： A form measuring instrument (1) includes: a body (10); a movable member (20) including: a stylus holder (22) being rotatably supported by the body (10); a stylus (23) being held by the stylus holder (22); and a tip (21) being provided at an end of the stylus (23) and being contactable with a workpiece surface (S); a measurement-force-applying unit (31) being adapted to generate a rotation force acting on the stylus holder (22) to bring the tip of the stylus (21) into contact with the workpiece surface (S); a displacement detector (32) being provided to a portion of the stylus holder (22) to detect a displacement of the stylus holder (22) resulting from a rotation thereof; and a vibration generator (33) being adapted to apply vibration (V) to the stylus holder (22).

    摘要翻译： 一种形状测量仪器（1）包括：主体（10）; 可动构件（20），包括：由所述主体（10）可旋转地支撑的触针座（22）; 由所述触针座（22）保持的触针（23）; 和尖端（21），其设置在所述触针（23）的端部并且可与工件表面（S）接触; 测量力施加单元（31），其适于产生作用在所述触针保持器（22）上以使所述触针的尖端与所述工件表面（S）接触的旋转力; 位移检测器（32），其设置在所述触针保持器（22）的一部分上，以检测所述触针座（22）由于其旋转而产生的位移; 以及适于将振动（V）施加到所述触针保持器（22）的振动发生器（33）。

    Lever head
    10.
    发明公开
    Lever head 审中-公开
    Hebelkopf

    公开(公告)号：EP2722637A1

    公开(公告)日：2014-04-23

    申请号：EP13189114.5

    申请日：2013-10-17

    申请人： Mitutoyo Corporation

    发明人： Hidaka, Kazuhiko

    IPC分类号： G01B7/016 ,  G01B5/016 ,  G01B11/00

    CPC分类号： G01B3/002 ,  G01B5/016

    摘要： A stylus support member extends in a first direction. A first and second elastic body attaching members 3a, 3b are spaced aside from each other in a second direction are arranged spaced aside from the stylus support member 2 in the first direction, and are connected to each other by first and second members. A first elastic body 12 is arranged between a holder 5 and the first elastic body attaching member 3a. A second elastic body 11 is arranged between a first member and the first elastic body attaching member 3a. A third elastic body 13 is arranged between a second member and the second elastic body attaching member 3b. A fourth elastic body 14 is arranged between the holder 5 and the second elastic body attaching member 3b. A detector 4 detects displacement in the second direction of the stylus support member 2. The first to fourth elastic members 11, 12, 13, 14 perform lever motion of a single degree of freedom.

    摘要翻译： 触针支撑构件沿第一方向延伸。 第一和第二弹性体安装部件3a，3b沿着第二方向彼此间隔开，在第一方向上与触针支撑部件2隔开设置，并且通过第一和第二部件彼此连接。 第一弹性体12布置在保持器5和第一弹性体附接构件3a之间。 第二弹性体11设置在第一构件和第一弹性体安装构件3a之间。 第三弹性体13设置在第二构件和第二弹性体安装构件3b之间。 第四弹性体14设置在保持器5和第二弹性体安装部件3b之间。 检测器4检测触针支撑构件2的第二方向的位移。第一至第四弹性构件11,12,13,14进行单个自由度的杠杆运动。