公开(公告)号：EP2464981B1

公开(公告)日：2017-06-28

申请号：EP10808737.0

申请日：2010-08-12

申请人： Meggitt (Orange County), Inc.

发明人： WILNER, Leslie, Bruce ,  KWA, Tom

IPC分类号： G01P1/02 ,  G01P15/08 ,  G01P15/12 ,  B81B3/00

CPC分类号： G01P15/123 ,  B81B3/0078 ,  B81B2201/0235 ,  G01P1/023 ,  G01P15/08 ,  G01P15/0802 ,  G01P2015/0882

公开(公告)号：EP2975412A1

公开(公告)日：2016-01-20

申请号：EP15170390.7

申请日：2015-06-03

申请人： Meggitt (Orange County), Inc.

发明人： KWA, Tom

IPC分类号： G01P15/12 ,  G01P15/08

CPC分类号： G01P15/09 ,  B81B3/0035 ,  B81B2203/0338 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0837

摘要： A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges.

公开(公告)号：EP2773969A1

公开(公告)日：2014-09-10

申请号：EP12846207.4

申请日：2012-10-31

申请人： Meggitt (Orange County), Inc.

发明人： KWA, Tom

IPC分类号： G01P15/00

CPC分类号： H01H35/14 ,  H01H35/142 ,  H01H59/0009

摘要： A motion-sensitive low-G MEMS acceleration switch, which is a MEMS switch that closes at low-g acceleration (e.g., sensitive to no more than 10 Gs), is proposed. Specifically, the low-G MEMS acceleration switch has a base, a sensor wafer with one or more proofmasses, an open circuit that includes two fixed electrodes, and a contact plate. During acceleration, one or more of the proofmasses move towards the base and connects the two fixed electrodes together, resulting in a closing of the circuit that detects the acceleration. Sensitivity to low-G acceleration is achieved by proper dimensioning of the proofmasses and one or more springs used to support the proofmasses in the switch.

公开(公告)号：EP2773969B1

公开(公告)日：2017-10-18

申请号：EP12846207.4

申请日：2012-10-31

申请人： Meggitt (Orange County), Inc.

发明人： KWA, Tom

IPC分类号： H01H59/00 ,  H01H35/14

CPC分类号： H01H35/14 ,  H01H35/142 ,  H01H59/0009

公开(公告)号：EP2975412B1

公开(公告)日：2017-02-01

申请号：EP15170390.7

申请日：2015-06-03

申请人： Meggitt (Orange County), Inc.

发明人： KWA, Tom

IPC分类号： G01P15/12 ,  G01P15/08

CPC分类号： G01P15/09 ,  B81B3/0035 ,  B81B2203/0338 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0837

摘要： A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges.

摘要翻译： 一种MEMS加速度传感器，包括：框架，多个校样物; 多个弯曲; 多个铰链和多个量规。 设计用于测量垂直于设备平面的方向上的加速度的框架，校对，弯曲，铰链和量规，同时通常抵抗平行于设备平面的运动。 加速度的测量通过压力计在压力表中的压阻效应来实现。