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公开(公告)号：EP3007358A1
公开(公告)日：2016-04-13
申请号：EP14804326.8
申请日：2014-05-27
CPC分类号： H03H9/6483 , H03H9/0009 , H03H9/02992 , H03H9/145 , H03H9/14541 , H03H9/1457 , H03H9/25 , H03H9/6426 , H03H9/6433
摘要： Provided is an elastic wave filter device in which transverse mode ripples can be effectively suppressed. An elastic wave filer device (1) includes serial and parallel arms and also includes a plurality of elastic wave resonators. Each elastic wave resonator includes an IDT electrode. In the case where a direction in which electrode fingers (23 and 24) extend is taken as a width direction of the IDT electrode, the IDT electrode is so configured as to have a central area at a center in the width direction, a low acoustic velocity area at an outer side portion of the central area, and a high velocity area at a further outer side portion thereof. A width (W1A) of the low acoustic velocity area of at least one elastic wave resonator differs from a width (W1B) of the low acoustic velocity area of the other elastic wave resonators.
摘要翻译： 提供一种弹性波滤波器装置，其中可以有效地抑制横向波纹。 弹性波形滤波器装置（1）包括串联和并联臂，并且还包括多个弹性波谐振器。 每个弹性波谐振器包括IDT电极。 在电极指（23,24）延伸的方向作为IDT电极的宽度方向的情况下，IDT电极被构造成具有在宽度方向中心的中心区域，低声 在中心区域的外侧部分处的速度区域和在其另一外侧部分处的高速区域。 至少一个弹性波谐振器的低声速区域的宽度（W1A）与其它弹性波谐振器的低声速区域的宽度（W1B）不同。
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公开(公告)号：EP2658122B1
公开(公告)日：2019-02-13
申请号：EP11850373.9
申请日：2011-12-12
发明人： KIMURA, Tetsuya , OGAMI, Takashi , DAIMON, Katsuya
IPC分类号： H03H9/02
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公开(公告)号：EP2658122A1
公开(公告)日：2013-10-30
申请号：EP11850373.9
申请日：2011-12-12
发明人： KIMURA, Tetsuya , OGAMI, Takashi , DAIMON, Katsuya
CPC分类号： H03H9/02535 , H01L41/18 , H01L41/1873 , H03H3/02 , H03H9/02228 , H03H9/02574 , Y10T29/42
摘要： An elastic wave device using plate waves is provided that requires no cavity and thus can be manufactured by a simplified process and offers high mechanical strength, ease of handling, and improved temperature characteristics. An elastic wave device (1) propagating plate waves has a stack of an acoustic reflection layer (3), a piezoelectric layer (4), and IDT electrode (5) on a supporting substrate 2. The piezoelectric layer (4) is thinner than the period of the fingers of the IDT electrode (5). The acoustic reflection layer (3) has low-acoustic-impedance layers (3b, 3d, 3f, and 3h) and high-acoustic-impedance layers (3a, 3c, 3e, and 3g). The low-acoustic-impedance layers are made of SiO 2 , and the high-acoustic-impedance layers are made of at least one material selected from the group consisting of W, LiTaO 3 , Al 2 O 3 , AIN, LiNbO 3 , SiN, and ZnO.
摘要翻译： 提供了使用平板波的弹性波装置，其不需要空腔，因此可以通过简化的工艺制造并且提供高机械强度，易于处理和改善的温度特性。 传播板波的弹性波装置（1）在支撑基板2上具有声反射层（3），压电层（4）和IDT电极（5）的叠层。压电层（4）比 IDT电极（5）的指状物的周期。 声反射层（3）具有低声阻抗层（3b，3d，3f和3h）和高声阻抗层（3a，3c，3e和3g）。 低声阻抗层由SiO 2制成，高声阻抗层由选自W，LiTaO 3，Al 2 O 3，AlN，LiNbO 3，SiN中的至少一种材料制成 ，和ZnO。
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