公开(公告)号：EP1046917A2

公开(公告)日：2000-10-25

申请号：EP00108261.9

申请日：2000-04-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Oguchi, Takahiro, c/o(A170) Intell. Prop. Dept.

IPC: G01P15/08

CPC classification number: G01C19/5719 ,  B81B2201/025 ,  B81C1/00579 ,  B81C1/00587 ,  B81C2201/0132 ,  B81C2201/014 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  Y10S148/012 ,  Y10S148/135 ,  Y10S148/159

Abstract: A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etching.

Abstract translation: 一种制造外力检测传感器的方法，其中通过元件基板（3）的通孔（20）干蚀刻形成传感器元件，并且导电材料被用作蚀刻停止层（18）期间 干蚀刻。