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    COMPOSITE SUBSTRATE
    1.
    发明公开
    COMPOSITE SUBSTRATE 有权
    复合材料基材

    公开(公告)号：EP2787638A1

    公开(公告)日：2014-10-08

    申请号：EP13840126.0

    申请日：2013-11-11

    申请人： NGK Insulators, Ltd. ,  NGK Ceramic Device Co., Ltd.

    发明人： TAI, Tomoyoshi ,  IWASAKI, Yasunori ,  HORI, Yuji ,  YAMADERA, Takahiro ,  HATTORI, Ryosuke ,  SUZUKI, Kengo

    IPC分类号： H03H9/25 ,  H03H9/145

    CPC分类号： H01L41/0838 ,  H01L41/053 ,  H01L41/312 ,  H03H9/02574

    摘要： A composite substrate according to the present invention includes a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer joining together the piezoelectric substrate and the support substrate. The amorphous layer contains 3 to 14 atomic percent of argon. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element (such as tantalum) of the piezoelectric substrate than the second and third layers. The third layer contains a larger amount of a constituent element (silicon) of the support substrate than the first and second layers. The second layer contains a larger amount of argon than the first and third layers.

    摘要翻译： 根据本发明的复合基板包括：作为单晶钽酸锂或铌酸锂基板的压电基板，作为单晶硅基板的支撑基板和将压电基板和支撑基板接合在一起的非晶层 。 无定形层含有3至14原子百分比的氩。 非晶层从压电基板朝向复合基板依次包括第一层，第二层和第三层。 第一层含有比第二层和第三层更大量的压电基片的组成元素（如钽）。 与第一层和第二层相比，第三层含有更多的支撑基板的构成元素（硅）。 第二层含有比第一层和第三层更大量的氩。

    COMPOSITE SUBSTRATE AND MANUFACTURING M ETHOD THEREOF
    3.
    发明公开
    COMPOSITE SUBSTRATE AND MANUFACTURING M ETHOD THEREOF 有权
    VERBUNDSUBSTRAT UND HERSTELLUNGSVERFAHRENDAFÜR

    公开(公告)号：EP2787637A1

    公开(公告)日：2014-10-08

    申请号：EP13840125.2

    申请日：2013-11-11

    申请人： NGK Insulators, Ltd. ,  NGK Ceramic Device Co., Ltd.

    发明人： HORI, Yuji ,  TAI, Tomoyoshi ,  IWASAKI, Yasunori ,  YAMADERA, Takahiro ,  HATTORI, Ryosuke ,  SUZUKI, Kengo

    IPC分类号： H03H9/25 ,  H03H3/08

    CPC分类号： H01L41/0838 ,  H01L41/312 ,  H03H9/02574

    摘要： The present invention provides a composite substrate comprising a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer containing argon and joining together the piezoelectric substrate and the support substrate. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element of the piezoelectric substrate than the second and third layers, the third layer contains a larger amount of a constituent element of the support substrate than the first and second layers, and the second layer contains a larger amount of argon than the first and third layers.

    摘要翻译： 本发明提供一种复合基板，其包括作为单晶钽酸锂或铌酸锂基板的压电基板，作为单晶硅基板的支撑基板和含有氩的非晶层并将压​​电基板与 支撑基板。 从压电基板向复合基板依次包括第一层，第二层和第三层。 第一层包含比第二层和第三层更大量的压电基板的构成元件，第三层包含比第一层和第二层更大量的支撑衬底的构成元件，并且第二层包含 比第一和第三层更大量的氩。