公开(公告)号：EP4319482A1

公开(公告)日：2024-02-07

申请号：EP22779521.8

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUTIYA, Jun ,  FUJINO, Daisuke ,  AIKAWA, Naoya ,  WADA, Keiko ,  NAKAJIMA, Aya

IPC: H05B3/10 ,  H05B3/72 ,  H01L21/683

Abstract: A placement board according to the present invention includes: a main body unit is configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. In a state where the heater has been driven and the medium has been caused to circulate through the flow channel, a temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20°C or more.