公开(公告)号：EP0784862B1

公开(公告)日：1999-12-15

申请号：EP95933863.3

申请日：1995-09-21

Applicant: Northrop Grumman Corporation

Inventor： KOTVAS, Joseph, C. ,  BRAGGINS, Timothy, T. ,  YOUNG, Robert, M. ,  FREIDHOFF, Carl, B.

IPC: H01J49/28

CPC classification number: H01J49/0018 ,  H01J49/288

Abstract: A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.

公开(公告)号：EP0784863A1

公开(公告)日：1997-07-23

申请号：EP95935011.0

申请日：1995-09-21

Applicant: Northrop Grumman Corporation

Inventor： FREIDHOFF, Carl, B. ,  YOUNG, Robert, M.

IPC: H01J49

CPC classification number: H01J49/0018 ,  H01J49/288

Abstract: A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.

公开(公告)号：EP0784863B1

公开(公告)日：2002-07-17

申请号：EP95935011.7

申请日：1995-09-21

Applicant: Northrop Grumman Corporation

Inventor： FREIDHOFF, Carl, B. ,  YOUNG, Robert, M.

IPC: H01J49/28 ,  H01J49/32 ,  H01J49/48

CPC classification number: H01J49/0018 ,  H01J49/288

公开(公告)号：EP0745268A1

公开(公告)日：1996-12-04

申请号：EP95903590.0

申请日：1994-11-22

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： FRIEDHOFF, Carl, B. ,  YOUNG, Robert, M. ,  SRIRAM, Saptharishi

IPC: H01J49

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

公开(公告)号：EP0745268B1

公开(公告)日：1998-10-21

申请号：EP95903590.8

申请日：1994-11-22

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： FRIEDHOFF, Carl, B. ,  YOUNG, Robert, M. ,  SRIRAM, Saptharishi

IPC: H01J49/00 ,  H01J49/28

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

公开(公告)号：EP0784862A1

公开(公告)日：1997-07-23

申请号：EP95933863.0

申请日：1995-09-21

Applicant: Northrop Grumman Corporation

Inventor： KOTVAS, Joseph, C. ,  BRAGGINS, Timothy, T. ,  YOUNG, Robert, M. ,  FREIDHOFF, Carl, B.

IPC: H01J49

CPC classification number: H01J49/0018 ,  H01J49/288

Abstract: A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.