公开(公告)号：EP2806258A1

公开(公告)日：2014-11-26

申请号：EP13168442.5

申请日：2013-05-20

申请人： NXP B.V.

发明人： Oldson, Marten ,  Pijnenburg, Remco Henricus Wilhelmus ,  Bominaar-Silkens, Iris ,  Besling, Willem

IPC分类号： G01L9/00 ,  G01L13/02 ,  G01L19/04 ,  G01L19/14

CPC分类号： G01L9/005 ,  G01L9/0073 ,  G01L9/125 ,  G01L13/025 ,  G01L19/147 ,  G01L19/148

摘要： A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.

摘要翻译： 差压传感器包括具有底座的空腔，底座包括基底电极和悬挂在基座上方的膜，该膜片包括膜电极，其中第一隔膜用限定在第一隔膜下面的空腔密封。 第一压力输入端口连接到密封的第一膜上方的空间。 电容读出系统用于测量基极和膜电极之间的电容。 互连通道位于空腔和第二压力输入端口之间，使得传感器响应于通过两个输入端口施加到膜的相对侧的差压。