公开(公告)号：EP3054275A3

公开(公告)日：2016-11-16

申请号：EP16151172.0

申请日：2016-01-14

申请人： Nagano Keiki Co., Ltd.

发明人： MIYASHITA, Kaori ,  TAKEDA, Eiji ,  NAGAI, Yuuji ,  MATSUMURA, Shinya

IPC分类号： G01L9/00

CPC分类号： G01L9/0058 ,  G01L9/0044 ,  G01L9/0055 ,  G01L9/006

摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element (3); resistor element electrodes (4), which are overlapped and connected with mutually opposed parts of the resistor element (3); and a linear conductor connected with the resistor element electrodes (4). The resistor element electrodes (4) each include: a linear portion (40S) having a linear inner side facing an inner side of paired one of the resistor element electrodes (4); and peripheral portions (40E) defined at both ends of the linear portion (40S), at least one of the peripheral portions (40E) being connected with the linear conductor. All of the linear portions (40S) are arranged so that inner sides (40L) are arranged mutually in parallel. The resistor element (3) is connected with the linear portion (40S). The peripheral portions (40E) are exposed without being connected with the resistor element (3).

摘要翻译： 通过在隔膜的平坦部分上涂布流体导电材料来提供检测器。 该检测器包括：电阻元件（3）; 电阻器元件电极（4），其与电阻器元件（3）的相对部分重叠并连接; 和与电阻器元件电极（4）连接的线性导体。 电阻器元件电极（4）包括：线性部分（40S），其具有面对电阻器元件电极（4）中的成对电阻器元件电极（4）的内侧的线性内侧; 和限定在线性部分（40S）两端的外围部分（40E），至少一个外围部分（40E）与线性导体连接。 所有线性部分40S被布置成使得内侧40L相互平行地布置。 电阻元件（3）与直线部分（40S）连接。 外围部分（40E）暴露而不与电阻器元件（3）连接。

公开(公告)号：EP4235128A1

公开(公告)日：2023-08-30

申请号：EP23158625.6

申请日：2023-02-24

申请人： NAGANO KEIKI CO., LTD.

发明人： MIYASHITA, Kaori ,  TAKAMATSU, Haruhiko ,  SUZUKI, Toshinori ,  ISEI, Yuuta

IPC分类号： G01L3/14

摘要： A torque sensor (1) includes: a first area (2) having a first surface (21) and a second surface (22) opposite the first surface (21); a second area (3) provided around the first area (2); a plurality of beams connecting the first area (2) to the second area (3); and a detector provided on the first surface (21) of the first area (2) and configured to detect torque applied between the first area (2) and the second area (3). The detector includes: an insulation film (51) layered on the first area (2); and strain gauges layered on the insulation film (51) and being deformable in response to torque. The second surface (22) of the first area (2) is provided with screw holes (23) that do not reach the first surface (21) and into which fasteners are respectively screwed. A thickness (H) defined between a bottom of each of the screw holes (23) and the first surface (21) is equal to or more than one fourth of a diameter (M) of each of the screw holes (23).

公开(公告)号：EP3054275B1

公开(公告)日：2018-10-24

申请号：EP16151172.0

申请日：2016-01-14

申请人： Nagano Keiki Co., Ltd.

发明人： MIYASHITA, Kaori ,  TAKEDA, Eiji ,  NAGAI, Yuuji ,  MATSUMURA, Shinya

IPC分类号： G01L9/00

CPC分类号： G01L9/0058 ,  G01L9/0044 ,  G01L9/0055 ,  G01L9/006

摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element (3); resistor element electrodes (4), which are overlapped and connected with mutually opposed parts of the resistor element (3); and a linear conductor connected with the resistor element electrodes (4). The resistor element electrodes (4) each include: a linear portion (40S) having a linear inner side facing an inner side of paired one of the resistor element electrodes (4); and peripheral portions (40E) defined at both ends of the linear portion (40S), at least one of the peripheral portions (40E) being connected with the linear conductor. All of the linear portions (40S) are arranged so that inner sides (40L) are arranged mutually in parallel. The resistor element (3) is connected with the linear portion (40S). The peripheral portions (40E) are exposed without being connected with the resistor element (3).

公开(公告)号：EP3961175A1

公开(公告)日：2022-03-02

申请号：EP20796367.9

申请日：2020-04-24

申请人： NAGANO KEIKI CO., LTD. ,  DENSO CORPORATION

发明人： KODAMA, Hiroshi ,  YOSHIDA, Naoki ,  MIYASHITA, Kaori ,  TAKEDA, Eiji ,  YAMADA, Nobuaki ,  TOMOMATSU, Yoshihiro ,  YANAGISAWA, Yasushi ,  MIDORIKAWA, Yusuke ,  KAMANARU, Shirou ,  YOKOYAMA, Kenichi ,  TOYODA, Inao ,  TAKEUCHI, Hisayuki ,  NIIMI, Naohisa ,  TAKAHASHI, Masao ,  URA, Yasutake ,  ASANO, Kouji ,  KAMADA, Yukihiro

IPC分类号： G01L9/06

摘要： A pressure sensor has a stem (10) in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm (13) deformable according to the pressure of the pressure medium are formed, and a strain detecting element (30) which is arranged on the diaphragm (13) via an insulating film (20) and being configured to output a detection signal according to the deformation of the diaphragm (13). The strain detecting element (30) is configured to have a portion made of polysilicon. A low doping layer (23) having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film (20) and the strain detecting element (30).

公开(公告)号：EP3054275A2

公开(公告)日：2016-08-10

申请号：EP16151172.0

申请日：2016-01-14

申请人： Nagano Keiki Co., Ltd.

发明人： MIYASHITA, Kaori ,  TAKEDA, Eiji ,  NAGAI, Yuuji ,  MATSUMURA, Shinya

IPC分类号： G01L9/00

CPC分类号： G01L9/0058 ,  G01L9/0044 ,  G01L9/0055 ,  G01L9/006

摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element (3); resistor element electrodes (4), which are overlapped and connected with mutually opposed parts of the resistor element (3); and a linear conductor connected with the resistor element electrodes (4). The resistor element electrodes (4) each include: a linear portion (40S) having a linear inner side facing an inner side of paired one of the resistor element electrodes (4); and peripheral portions (40E) defined at both ends of the linear portion (40S), at least one of the peripheral portions (40E) being connected with the linear conductor. All of the linear portions (40S) are arranged so that inner sides (40L) are arranged mutually in parallel. The resistor element (3) is connected with the linear portion (40S). The peripheral portions (40E) are exposed without being connected with the resistor element (3).

公开(公告)号：EP3037798A1

公开(公告)日：2016-06-29

申请号：EP15202304.0

申请日：2015-12-23

申请人： Nagano Keiki Co., Ltd.

发明人： HATA, Yukihiko ,  MIYASHITA, Kaori ,  TAKEDA, Eiji

IPC分类号： G01L9/00

CPC分类号： G01L9/0051

摘要： A detector (20) provided on a flat portion of a diaphragm (10) includes a plurality of strain gauges (3), resistor element connectors (4) connecting adjacent ones of the strain gauges (3), and an electric conductor (6) covering a part of the resistor element connectors (4). First linear portions (411, 421, 431, 441) and second linear portions (412, 422, 432, 442) of the resistor element connectors (4) exposed from the electric conductor (6) are orthogonal to the edges (61A, 61B, 62A, 62B, 63A, 63B, 64A, 64B) of the electric conductor (6) extending across the first linear portions (411, 421, 431, 441) and the second linear portions (412, 422, 432, 442). Even when a pattern of the resistor element connector (4) and a pattern of electric conductor (6) are misaligned in X direction or in Y direction, an area of the resistor element connector (4) exposed from the electric conductor (6) does not change.

摘要翻译： 设置在隔膜（10）的平坦部分上的检测器（20）包括多个应变仪（3），连接相邻的应变计（3）的电阻元件连接器（4）和电导体（6） 覆盖电阻元件连接器（4）的一部分。 从电导体（6）暴露的电阻元件连接器（4）的第一直线部分（411,421,431,441）和第二直线部分（412,422,432,442）与边缘（61A，61B）垂直 ，所述导电体（6）延伸穿过所述第一线性部分（411,421,431,441）和所述第二直线部分（412,422,432,442）。 即使当电阻元件连接器（4）的图案和电导体（6）的图案在X方向或Y方向上不对准时，从电导体（6）露出的电阻元件连接器（4）的面积 不变。