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公开(公告)号：EP3778141A1
公开(公告)日：2021-02-17
申请号：EP20200465.1
申请日：2016-07-25
发明人： SHIRAKI, Takahiro , KITAHARA, Yasuyuki , KURIBAYASHI, Tamotsu , NAKAE, Takao , KAINO, Shigeyuki
IPC分类号： B25J9/06 , B25J9/04 , B25J18/04 , H01L21/677
摘要： This application is to provide an industrial robot in which a main body portion, to which the base end side of an arm is rotatably joined, can be made thin. For instance, this industrial robot is equipped with hands, on which objects-to-be-transferred are to be mounted, an arm, with which the hand is rotatably joined to the front end side thereof, and a main body portion 7, with which the base end side of the arm is rotatably joined; the main body portion 7 is provided with an elevating unit 20, to which the base end side of the arm is rotatably joined on the top surface side thereof, a housing 21, which holds the elevating unit 20 to be raised/lowered and in which at least part of the bottom end of the elevating unit 20 is housed, and an elevating mechanism 22 for raising/lowering the elevating unit 20. The elevating mechanism 22 is housed in the housing 21 such that it aligns with the elevating unit when viewed in the top-bottom direction.
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公开(公告)号：EP3406406A1
公开(公告)日：2018-11-28
申请号：EP16834953.8
申请日：2016-07-25
发明人： SHIRAKI, Takahiro , KITAHARA, Yasuyuki , KURIBAYASHI, Tamotsu , NAKAE, Takao , KAINO, Shigeyuki
IPC分类号： B25J9/06
CPC分类号： B25J9/042 , B25J9/06 , B25J11/0095 , B25J18/04 , H01L21/67748 , H01L21/67766
摘要： This application is to provide an industrial robot in which a main body portion, to which the base end side of an arm is rotatably joined, can be made thin. For instance, this industrial robot is equipped with hands, on which objects-to-be-transferred are to be mounted, an arm, with which the hand is rotatably joined to the front end side thereof, and a main body portion 7, with which the base end side of the arm is rotatably joined; the main body portion 7 is provided with an elevating unit 20, to which the base end side of the arm is rotatably joined on the top surface side thereof, a housing 21, which holds the elevating unit 20 to be raised/lowered and in which at least part of the bottom end of the elevating unit 20 is housed, and an elevating mechanism 22 for raising/lowering the elevating unit 20. The elevating mechanism 22 is housed in the housing 21 such that it aligns with the elevating unit when viewed in the top-bottom direction.
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公开(公告)号：EP3214645A1
公开(公告)日：2017-09-06
申请号：EP15855545.8
申请日：2015-10-21
IPC分类号： H01L21/677 , B25J9/06
CPC分类号： B25J9/06 , B25J9/042 , B25J9/043 , H01L21/67766
摘要： [Problem]
To provide an industrial robot that can appropriately transfer a semiconductor wafer even in the case where each arm part length of arm parts that constitute an arm is elongated and a rotation center of the arm in relation to a main body is made closer to a side of a FOUP or a side of a semiconductor wafer processing device.
[Means to Solve the Problem]
Where a radius of curvature of a top end of an arm part 20 is referred to as a radius R, an angle of a reducing-width part 20a of the arm part 20 is referred to as an angle θ , a length of an arm part center line CL connecting a rotation center C2 of a hand 15 and a rotation center C3 of the arm part 20 is referred to as a length L, an angle of the arm part center line CL in relation to a first wall surface 10c, at a time just after a finish of bringing a wafer into a FOUP 8, is referred to as a first angle θ 1, and a distance between the rotation center C3 and the first wall surface 10c, at the time just after the finish of bringing the wafer into the FOUP, is referred to as a distance d1; a relationship of a formula of "L × sin θ 1 θ ≦ 2 × θ 1" is established as well, in the industrial robot.摘要翻译： 本发明提供一种工业用机器人，即使在构成臂的臂部的各臂部长度变长且臂部相对于主体的旋转中心接近的情况下，也能够适当地搬运半导体晶片 FOUP的一侧或半导体晶片处理装置的一侧。 解决问题的手段当臂部分20的顶端的曲率半径被称为半径R时，臂部分20的缩小宽度部分20a的角度被称为角度θ 将连接手15的旋转中心C2和臂部20的旋转中心C3的臂部中心线CL的长度称为长度L，将臂部中心线CL相对于 在将晶片装入FOUP8之后的刚完成之后的第一壁面10c被称为第一角度θ1，并且旋转中心C3与第一壁面10c之间的距离 在将晶片装入FOUP完成之后，称为距离d1; 建立“L×sinθ1
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