利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

13 条记录 (耗时 0.011 秒)

    Loading/unloading robot
    1.
    发明公开
    Loading/unloading robot 有权
    装载/卸载机器人

    公开(公告)号：EP2716416A2

    公开(公告)日：2014-04-09

    申请号：EP13187347.3

    申请日：2013-10-04

    申请人： Hirata Corporation

    发明人： Ando, Hiroaki

    IPC分类号： B25J9/04

    CPC分类号： B25J18/04 ,  B25J9/043 ,  B25J11/0095

    摘要： A loading/unloading robot includes an arm unit attached to a support unit that is capable of being raised and lowered and a hand unit for conveying a loaded/unloaded object, attached to the arm unit. The support unit includes a base portion capable of revolving around a raising/lowering axis and a head portion rotatably attached to the base portion. The arm unit includes arms that are rotatably attached to the head portion. Front ends of the arms move forward and backward along a forward/backward direction that passes the head portion. The hand unit includes a loading/unloading hand rotatably attached to the arm. A center distance from the rotational axis of the head portion to the rotational axes of rear arms is shorter than a center distance from an axis of revolution of the base portion to the rotational axis of the head portion.

    摘要翻译： 装载/卸载机器人包括附接到能够升降的支撑单元的臂单元和附接到臂单元的用于传送装载/卸载物体的手单元。 支撑单元包括能够围绕升降轴旋转的基部和可旋转地附接到基部的头部。 臂单元包括可旋转地附接到头部的臂。 臂的前端沿着通过头部的前后方向前后移动。 手单元包括可旋转地连接到手臂的装载/卸载手。 从头部的旋转轴线到后臂的旋转轴线的中心距离小于从基部的旋转轴线到头部的旋转轴线的中心距离。

    INDUSTRIAL ROBOT
    3.
    发明公开
    INDUSTRIAL ROBOT 审中-公开

    公开(公告)号：EP3214645A4

    公开(公告)日：2018-05-16

    申请号：EP15855545

    申请日：2015-10-21

    申请人： NIDEC SANKYO CORP

    发明人： KURIBAYASHI TAMOTSU ,  KITAHARA YASUYUKI

    IPC分类号： H01L21/677 ,  B25J9/04 ,  B25J9/06

    CPC分类号： B25J9/06 ,  B25J9/042 ,  B25J9/043 ,  H01L21/67766

    摘要： [Problem] To provide an industrial robot that can appropriately transfer a semiconductor wafer even in the case where each arm part length of arm parts that constitute an arm is elongated and a rotation center of the arm in relation to a main body is made closer to a side of a FOUP or a side of a semiconductor wafer processing device. [Means to Solve the Problem] Where a radius of curvature of a top end of an arm part 20 is referred to as a radius R, an angle of a reducing-width part 20a of the arm part 20 is referred to as an angle ¸ , a length of an arm part center line CL connecting a rotation center C2 of a hand 15 and a rotation center C3 of the arm part 20 is referred to as a length L, an angle of the arm part center line CL in relation to a first wall surface 10c, at a time just after a finish of bringing a wafer into a FOUP 8, is referred to as a first angle ¸ 1, and a distance between the rotation center C3 and the first wall surface 10c, at the time just after the finish of bringing the wafer into the FOUP, is referred to as a distance d1; a relationship of a formula of "L × sin ¸ 1

    LOAD LOCK SYSTEM AND METHOD FOR TRANSFERRING SUBSTRATES IN A LITHOGRAPHY SYSTEM
    5.
    发明公开
    LOAD LOCK SYSTEM AND METHOD FOR TRANSFERRING SUBSTRATES IN A LITHOGRAPHY SYSTEM 审中-公开
    负载锁定系统和用于在光刻系统中传输衬底的方法

    公开(公告)号：EP3218926A2

    公开(公告)日：2017-09-20

    申请号：EP15830887.4

    申请日：2015-11-12

    申请人： Mapper Lithography IP B.V.

    发明人： DANSBERG, Michel Pieter ,  HESDAHL, Sjoerd ,  JONGENEEL, Jan Pieter Roelof

    IPC分类号： H01L21/67 ,  G03F7/20 ,  B25J9/04 ,  B25J11/00 ,  H01L21/677 ,  H01L21/687 ,  B25J17/02

    CPC分类号： B65G47/90 ,  B25J9/0087 ,  B25J9/043 ,  G03F7/7075 ,  H01L21/67201 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68707

    摘要： The present invention relates to an apparatus and a method for transferring substrates into and from a vacuum chamber in a lithography apparatus. The load lock system comprises: a load lock chamber provided with an opening for allowing passage of a substrate in and out of the load lock chamber, and a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm. The arm comprises at least three hinging arm parts, wherein a first and a second arm part are hingedly connected to the sub-frame with a proximal end thereof. A third arm part is hingedly connected to the distal ends of the first and second arm parts. The arm parts are arranged to form a four-bar linkage.

    摘要翻译： 本发明涉及一种用于将衬底传送到光刻设备中的真空室和从真空室传送衬底的设备和方法。 所述负载锁定系统包括：装载锁定室，所述装载锁定室设置有用于允许基板进出所述负载锁定室的开口;以及传送装置，所述传送装置包括至少部分地布置在所述负载锁定室中的子框架，臂 其近端连接到副框架;以及基板接收单元，其连接到臂的远端。 臂包括至少三个铰接臂部分，其中第一和第二臂部分以其近端铰接地连接到子框架。 第三臂部分铰接连接到第一和第二臂部分的远端。 臂部分被布置成形成四连杆机构。

    INDUSTRIAL ROBOT
    6.
    发明公开
    INDUSTRIAL ROBOT 审中-公开
    工业机器人

    公开(公告)号：EP3214645A1

    公开(公告)日：2017-09-06

    申请号：EP15855545.8

    申请日：2015-10-21

    申请人： Nidec Sankyo Corporation

    发明人： KURIBAYASHI, Tamotsu ,  KITAHARA, Yasuyuki

    IPC分类号： H01L21/677 ,  B25J9/06

    CPC分类号： B25J9/06 ,  B25J9/042 ,  B25J9/043 ,  H01L21/67766

    摘要： [Problem]
    To provide an industrial robot that can appropriately transfer a semiconductor wafer even in the case where each arm part length of arm parts that constitute an arm is elongated and a rotation center of the arm in relation to a main body is made closer to a side of a FOUP or a side of a semiconductor wafer processing device.
    [Means to Solve the Problem]
    Where a radius of curvature of a top end of an arm part 20 is referred to as a radius R, an angle of a reducing-width part 20a of the arm part 20 is referred to as an angle θ , a length of an arm part center line CL connecting a rotation center C2 of a hand 15 and a rotation center C3 of the arm part 20 is referred to as a length L, an angle of the arm part center line CL in relation to a first wall surface 10c, at a time just after a finish of bringing a wafer into a FOUP 8, is referred to as a first angle θ 1, and a distance between the rotation center C3 and the first wall surface 10c, at the time just after the finish of bringing the wafer into the FOUP, is referred to as a distance d1; a relationship of a formula of "L × sin θ 1 θ ≦ 2 × θ 1" is established as well, in the industrial robot.

    摘要翻译： 本发明提供一种工业用机器人，即使在构成臂的臂部的各臂部长度变长且臂部相对于主体的旋转中心接近的情况下，也能够适当地搬运半导体晶片 FOUP的一侧或半导体晶片处理装置的一侧。 解决问题的手段当臂部分20的顶端的曲率半径被称为半径R时，臂部分20的缩小宽度部分20a的角度被称为角度θ 将连接手15的旋转中心C2和臂部20的旋转中心C3的臂部中心线CL的长度称为长度L，将臂部中心线CL相对于 在将晶片装入FOUP8之后的刚完成之后的第一壁面10c被称为第一角度θ1，并且旋转中心C3与第一壁面10c之间的距离 在将晶片装入FOUP完成之后，称为距离d1; 建立“L×sinθ1

    Loading/unloading robot
    7.
    发明公开
    Loading/unloading robot 有权
    充电/放电设备

    公开(公告)号：EP2716416A3

    公开(公告)日：2014-11-12

    申请号：EP13187347.3

    申请日：2013-10-04

    申请人： Hirata Corporation

    发明人： Ando, Hiroaki

    IPC分类号： B25J9/04

    CPC分类号： B25J18/04 ,  B25J9/043 ,  B25J11/0095

    摘要： A loading/unloading robot includes an arm unit attached to a support unit that is capable of being raised and lowered and a hand unit for conveying a loaded/unloaded object, attached to the arm unit. The support unit includes a base portion capable of revolving around a raising/lowering axis and a head portion rotatably attached to the base portion. The arm unit includes arms that are rotatably attached to the head portion. Front ends of the arms move forward and backward along a forward/backward direction that passes the head portion. The hand unit includes a loading/unloading hand rotatably attached to the arm. A center distance from the rotational axis of the head portion to the rotational axes of rear arms is shorter than a center distance from an axis of revolution of the base portion to the rotational axis of the head portion.

    DRIVE DEVICE AND CONVEYANCE DEVICE
    8.
    发明公开
    DRIVE DEVICE AND CONVEYANCE DEVICE 审中-公开
    ANTRIEBSVORRICHTUNG UNDFÖRDERVORRICHTUNG

    公开(公告)号：EP2520398A1

    公开(公告)日：2012-11-07

    申请号：EP10840757.8

    申请日：2010-12-22

    申请人： Ulvac, Inc.

    发明人： NAKAO, Hirotoshi ,  NISHITSUJI, Muneyoshi ,  YOSHINO, Takahiro ,  KURIYAMA, Takuya ,  CHIBA, Taiji ,  KAWAKUBO, Daisuke ,  YAMADA, Kiyotaka

    IPC分类号： B25J9/06 ,  B65G49/07 ,  H01L21/677

    CPC分类号： H01L21/67742 ,  B25J9/003 ,  B25J9/043 ,  B25J9/1065

    摘要： [Object] To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same.
    [Solving Means] A drive device 50 includes a frame 60 and an actuator 70 installed in the frame 60. The frame 60 is formed by integral molding by casting. The frame 60 includes a connecting portion 61 connectable to a division wall of a conveyance chamber, a bottom plate portion 62 serving as an opposed portion provided to be opposed to the connecting portion 61, and a plurality of coupling portions 63 that couple the connecting portion 61 and the bottom plate portion 62 to each other. The actuator 70 includes three coaxial shafts 75 (two rotating shafts 71 and 72 and single turning shaft 73), three motors 74, and a transmission mechanism that transmits a rotational driving force by the three motors 74 to the three shafts 75. The frame 60 is formed by the integral molding, and hence it is possible to realize a drive device 70 having a high rigidity.

    摘要翻译： 本发明提供一种驱动装置，该驱动装置足够坚硬以承受在臂装置的驱动期间由于反作用而引起的应力，并提供包括该驱动装置的输送装置。 [解决方案]驱动装置50包括框架60和安装在框架60中的致动器70.框架60通过铸造一体成型而形成。 框架60包括可连接到输送室的分隔壁的连接部分61，用作与连接部分61相对设置的相对部分的底板部分62和多个连接部分63， 61和底板部62彼此。 致动器70包括三个同轴轴75（两个旋转轴71和72以及单个转动轴73），三个电动机74和将三个电动机74的旋转驱动力传递到三个轴75的传动机构。框架60 通过一体成型而形成，因此可以实现高刚性的驱动装置70。