公开(公告)号：EP2283395B1

公开(公告)日：2018-08-22

申请号：EP09735282.7

申请日：2009-04-25

申请人： Northwestern University

发明人： MIRKIN, Chad, A. ,  HUO, Fengwei ,  ZHENG, Zijian ,  ZHENG, Gengfeng

IPC分类号： G03F7/00 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  Y10S977/856 ,  Y10S977/874 ,  Y10S977/878 ,  Y10S977/887 ,  Y10S977/888 ,  Y10S977/902

摘要： The disclosure relates to methods of printing indicia on a substrate using a tip array comprised of elastomeric, compressible polymers. The tip array can be prepared using conventional photolithographic methods and can be tailored to have any desired number and/or arrangement of tips. Numerous copies (e.g., greater than 15,000, or greater than 11 million) of a pattern can be made in a parallel fashion in as little as 40 minutes.

公开(公告)号：EP2438608A2

公开(公告)日：2012-04-11

申请号：EP10784163.7

申请日：2010-06-04

申请人： Northwestern University

发明人： MIRKIN, Chad, A. ,  SHIM, Wooyoung ,  BRAUNSCHWEIG, Adam, B. ,  LIAO, Xing ,  CHAI, Jinan ,  LIM, Jong, Kuk ,  ZHENG, Gengfeng ,  ZHENG, Zijian

IPC分类号： H01L21/027

CPC分类号： G03F7/0002 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00111 ,  B81C1/0046 ,  B81C2201/0154 ,  B81C2201/0185 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/732

摘要： Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.