公开(公告)号：EP3083461B1

公开(公告)日：2018-07-18

申请号：EP14837052.1

申请日：2014-12-19

申请人： Nuvosun, Inc.

发明人： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC分类号： B65H20/06 ,  C23C16/509 ,  C23C16/54 ,  C23C18/02 ,  C23C18/12 ,  H01L31/0392 ,  H01L31/20

CPC分类号： C23C2/24 ,  B65H20/06 ,  B65H2301/51214 ,  B65H2301/5162 ,  B65H2401/213 ,  B65H2404/20 ,  B65H2404/694 ,  B65H2515/71 ,  B65H2701/1121 ,  B65H2801/87 ,  C23C18/02 ,  C23C18/1204 ,  H01L31/0392 ,  H01L31/03923 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

摘要： Disclosed are methods and systems for processing a web. The web (402) has a first surface, a second surface opposite the first surface, and includes a magnetic material. An example system includes a processing bed (202) configured to support the web while the first surface of the web undergoes one or more processing steps. The system also includes magnets (300) positioned relative to the processing bed so as to exert a magnetic force on the web that pulls the center of the web (403) toward the processing bed. The system further includes a conveyor belt (404) configured to move the web over the processing bed (202). The conveyor belt has a first contact surface and a second contact surface opposite the first contact surface. The first contact surface is configured to contact the second surface of the web, and the second contact surface is configured to contact the processing bed.

公开(公告)号：EP3083461A1

公开(公告)日：2016-10-26

申请号：EP14837052.1

申请日：2014-12-19

申请人： Nuvosun, Inc.

发明人： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC分类号： B65H20/06 ,  C23C16/509 ,  C23C16/54 ,  H01L31/0392 ,  H01L31/20

CPC分类号： C23C2/24 ,  B65H20/06 ,  B65H2301/51214 ,  B65H2301/5162 ,  B65H2401/213 ,  B65H2404/20 ,  B65H2404/694 ,  B65H2515/71 ,  B65H2701/1121 ,  B65H2801/87 ,  C23C18/02 ,  C23C18/1204 ,  H01L31/0392 ,  H01L31/03923 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

摘要： Disclosed are methods and systems for processing a web. The web (402) has a first surface, a second surface opposite the first surface, and includes a magnetic material. An example system includes a processing bed (202) configured to support the web while the first surface of the web undergoes one or more processing steps. The system also includes magnets (300) positioned relative to the processing bed so as to exert a magnetic force on the web that pulls the center of the web (403) toward the processing bed. The system further includes a conveyor belt (404) configured to move the web over the processing bed (202). The conveyor belt has a first contact surface and a second contact surface opposite the first contact surface. The first contact surface is configured to contact the second surface of the web, and the second contact surface is configured to contact the processing bed.

摘要翻译： 公开了用于处理网络的方法和系统。 网（402）具有第一表面，与第一表面相对的第二表面，并且包括磁性材料。 示例性系统包括被配置为在卷筒纸的第一表面经历一个或多个处理步骤时支撑卷筒纸的处理床（202）。 该系统还包括相对于处理床定位的磁体（300），以便在将幅材（403）的中心拉向处理床的幅材上施加磁力。 所述系统还包括被配置为将所述幅材移动到所述处理床（202）上的传送带（404）。 输送带具有与第一接触表面相对的第一接触表面和第二接触表面。 第一接触表面构造成接触幅材的第二表面，并且第二接触表面构造成接触处理床。

公开(公告)号：EP3084038B1

公开(公告)日：2018-05-23

申请号：EP14833559.9

申请日：2014-12-19

申请人： Nuvosun, Inc.

发明人： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC分类号： C23C18/12 ,  H01L31/0392 ,  H01L31/18

CPC分类号： H01L31/1876 ,  B05C5/007 ,  B05C11/026 ,  B05C11/1039 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/03925 ,  H01L31/03926 ,  H01L31/1836 ,  H01L31/1884 ,  Y02E10/50

摘要： Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.

公开(公告)号：EP3084038A1

公开(公告)日：2016-10-26

申请号：EP14833559.9

申请日：2014-12-19

申请人： Nuvosun, Inc.

发明人： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC分类号： C23C18/12 ,  H01L31/0392 ,  H01L31/18

CPC分类号： H01L31/1876 ,  B05C5/007 ,  B05C11/026 ,  B05C11/1039 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/03925 ,  H01L31/03926 ,  H01L31/1836 ,  H01L31/1884 ,  Y02E10/50

摘要： Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.