公开(公告)号：EP0661385A4

公开(公告)日：1994-09-29

申请号：EP92917995

申请日：1992-08-19

申请人： OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  IMAOKA TAKASHI DEPARTMENT OF E ,  SHIMADA HISAYUKI DEPART OF ELE ,  KONISHI NOBUHIRO DEPART OF ELE ,  MORITA MIZUHO DEPARTMENT OF EL ,  YAMASHITA TAKEO DEPART OF ELEC ,  SHIBATA TADASHI DEPART OF ELEC ,  WAKAMATSU HIDETOSHI DEP OF ELE ,  WATANABE JINZO DEPARTMENT OF E ,  AOYAMA SHINTARO DEPART OF ELEC ,  NAKAMURA MASAKAZU DEPART OF EL

IPC分类号： C23C8/10 ,  C23C8/36 ,  C23C14/02 ,  C23C14/48 ,  C23C14/56 ,  C23C16/02 ,  C23C16/44 ,  C30B23/02 ,  C30B25/02 ,  H01L21/306 ,  H01L21/314 ,  H01L21/316 ,  C23C16/48 ,  G01B21/30 ,  G01N23/227 ,  G21K5/00 ,  H01L21/027 ,  H01L21/263 ,  H01L21/265 ,  H01L21/304 ,  H01L21/68

CPC分类号： H01L21/02052 ,  C23C8/10 ,  C23C8/36 ,  C23C14/021 ,  C23C14/022 ,  C23C14/48 ,  C23C14/564 ,  C23C16/02 ,  C23C16/4401 ,  C30B23/02 ,  C30B25/02 ,  C30B29/16 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31612

摘要： Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressures in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultraviolet rays on gases introduced to at least one of the vessels.