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    SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREFOR
    2.
    发明公开
    SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREFOR 审中-公开
    GRID探针显微镜及其控制方法

    公开(公告)号：EP2767837A4

    公开(公告)日：2015-05-27

    申请号：EP12839241

    申请日：2012-10-03

    申请人： OLYMPUS CORP

    发明人： SAKAI NOBUAKI

    IPC分类号： G01Q60/32

    CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q10/065 ,  G01Q60/32

    摘要： A scanning probe microscope includes a cantilever 12 having a probe 11 at a free thereof, a displacement detection unit 15 to output a displacement signal of the cantilever 12, a vibrating unit 14 to vibrate the cantilever 12, and a scanning unit 20 to three-dimensionally relatively move the sample 19 and probe 11. A mixed signal generation unit 30 includes an amplitude information detecting section 31 to provide a vibrating signal to the vibrating unit 14 and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section 32 to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller 25 to control the scanning unit 20 includes a Z control section 26, which controls the distance between the sample 19 and the probe 11 on the basis of the mixed signal.

    COMPOUND MICROSCOPE
    5.
    发明公开
    COMPOUND MICROSCOPE 审中-公开
    复合显微镜

    公开(公告)号：EP2840399A4

    公开(公告)日：2016-01-13

    申请号：EP13777822

    申请日：2013-04-05

    申请人： OLYMPUS CORP

    发明人： SAKAI NOBUAKI ,  UEKUSA YOSHITSUGU

    IPC分类号： G01Q30/02 ,  G01Q60/24 ,  G02B21/00 ,  G02B21/06 ,  G02B21/26

    CPC分类号： G01Q10/00 ,  G01Q30/025 ,  G02B21/0004 ,  G02B21/0088 ,  G02B21/06

    摘要： A sample substrate 2 is supported on a microscope stage 21 of an inverted optical microscope, and a sample 1 and a solution 4 are held on the sample substrate 2. An AFM comprises a cantilever chip 3 and an XYZ scanner 6. The cantilever chip 3 comprises a cantilever 3b supported by the substrate 3a and a probe 3c provided at the free end of the cantilever 3b. The cantilever chip holder 7 holds the cantilever chip 3 so that the probe 3c faces the sample substrate 2 and so that the substrate 3a is inclined with respect to the sample substrate 2. A Z scanner 8 and an XY scanner 9 three-dimensionally scan the cantilever chip 3 with respect to the sample substrate 2. An illumination light source 32 illuminates the sample 1 through the space between the substrate of the cantilever chip 3 and the sample substrate 2.