PHOTOLITHOGRAPHY METHOD
    1.
    发明授权
    PHOTOLITHOGRAPHY METHOD 有权
    FOTOLITHOGRAFIEVERFAHREN

    公开(公告)号:EP2239629B1

    公开(公告)日:2016-03-30

    申请号:EP09706190.7

    申请日:2009-01-28

    Abstract: Provided is a nonlinear optical material an optical recording maternal, an optical recording method, a photosensitive material, a photopolymerization initiator, and a photosensitizer. One exemplary aspect of the present invention is a photosensitive material used for photolithography for forming a pattern by irradiating a photoresist with excitation light which includes a donor molecule 11 that is excited by the excitation light, and an acceptor molecule 12 that is excited by energy transfer or charge transfer from the excited donor 11.

    Abstract translation: 提供了非线性光学材料,光学记录母体,光学记录方法,感光材料,光聚合引发剂和光敏剂。 本发明的一个示例性方面是用于光刻的感光材料,用于通过用激发光照射光致抗蚀剂来形成图案,所述激发光包括由激发光激发的施主分子11和受能量转移激发的受主分子12 或从受激供体11的电荷转移。

    FLUORESCENCE MICROSCOPE AND OBSERVATION METHOD
    2.
    发明授权
    FLUORESCENCE MICROSCOPE AND OBSERVATION METHOD 有权
    荧光显微镜和监测程序

    公开(公告)号:EP1835323B1

    公开(公告)日:2012-08-01

    申请号:EP05793232.9

    申请日:2005-10-14

    Abstract: A fluorescence microscope in which spatial resolution is enhanced by performing observation based on the saturation component of fluorescence. The fluorescence microscope comprises a light source (10) emitting laser light to serve as pumping light, an objective lens (13) for focusing the laser light and irradiating a sample with the focused laser light, a detector (22) for detecting fluorescence generated from the sample (14) by the laser light, and a stage (15) performing scanning while varying the relative position of the laser light and the sample (14). The sample is irradiated with laser light while varying the intensity of the laser light such that the fluorescence saturates when the intensity of laser light is the greatest, the fluorescence depending on the intensity of laser light is detected by the detector (22), and observation is performed based on the saturation component of fluorescence.

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