公开(公告)号：EP2936538A1

公开(公告)日：2015-10-28

申请号：EP13826886.7

申请日：2013-12-20

Applicant: Organic Spintronics S.R.L.

Inventor： YARMOLICH, Dmitry ,  TALIANI, Carlo

IPC: H01J37/077 ,  H01J37/305

CPC classification number: C23C16/515 ,  C23C16/487 ,  H01J3/025 ,  H01J37/077 ,  H01J37/30 ,  H01J37/3053 ,  H01J37/32532 ,  H01J2237/06375 ,  H01J2237/151 ,  H01J2237/3132

Abstract: A pulsed plasma deposition device, comprising an apparatus for generating a beam of electrons (3), a target (4) and a substrate (6), the apparatus (3) being suitable for generating a pulsed beam of electrons directed towards said target (4) to determine the ablation of the material of said target (4) in the form of a plasma plume (19) directed towards said substrate (6); the device comprises a transportation and focussing group (13) of the beam of electrons towards said target (4), arranged between said apparatus (3) and said target (4) and comprising a transportation cone (14), the transportation and focussing group (13) also comprising a focussing electrode (15) directly connected to the transportation cone (14) and shaped substantially like a loop; the axis of symmetry (16) of the focussing electrode (15) is perpendicular, or substantially perpendicular, to the surface of the target (4).

公开(公告)号：EP2936538B1

公开(公告)日：2017-01-11

申请号：EP13826886.7

申请日：2013-12-20

Applicant: Organic Spintronics S.R.L.

Inventor： YARMOLICH, Dmitry ,  TALIANI, Carlo

IPC: H01J37/077 ,  H01J37/305 ,  H01J3/02

CPC classification number: C23C16/515 ,  C23C16/487 ,  H01J3/025 ,  H01J37/077 ,  H01J37/30 ,  H01J37/3053 ,  H01J37/32532 ,  H01J2237/06375 ,  H01J2237/151 ,  H01J2237/3132