摘要:
An electronic part includes: a substrate; a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and a protective film formed on the upper surface of the substrate so as to cover the comb-shaped electrode. The protective film has convex portions and concave portions. The convex portions are upwardly convex at the positions corresponding to the electrode fingers, and the concave portions are downwardly concave between the convex portions. The cross section of the protective film in the direction orthogonal to the extending direction of the electrode fingers has a downward convex curve between apex portions of the convex portions.
摘要:
The present invention provides a surface acoustic wave resonator capable of improving the leak of a surface acoustic wave in the transverse direction and reducing the spurious and having superior characteristics. In a surface acoustic wave filter according to the present invention, an interdigital transducer electrode and reflector electrodes are formed on a piezoelectric substrate, and a SiO 2 thin film is further formed thereon. The interdigital transducer electrode includes a bus-bar electrode region, a dummy electrode region and a finger overlap region, and the SiO 2 thin film is removed from upper sections of the bus-bar electrode regions in the interdigital transducer electrode.
摘要:
An elastic wave element includes a piezoelectric substrate, an interdigital electrode provided on the piezoelectric substrate, a silicon oxide film covering the interdigital electrode, and a silicon nitride oxide film provided on the silicon oxide film. A film thickness H of the silicon oxide film and a wave length » of an elastic wave propagating through the piezoelectric substrate satisfies a relation of H/»‰¥0.15. The elastic wave element reduces fluctuation of propagation characteristics of elastic waves, and has high reliability.
摘要:
A plurality of surface acoustic wave resonators (15-20), each consisting of an interdigital electrode and a grating reflector, are connected on a piezoelectric substrate (12). A dielectric film (14) is formed on the surface of at least one of the surface acoustic wave resonators (15-20), and the dielectric film (14) is not formed on the surface of at least one acoustic wave resonator. Thus, it is possible to obtain an SAW filter having a low in-band insertion loss, good sharpness and a wide band.