ELECTRONIC PART AND MANUFACTURING METHOD THEREOF
    1.
    发明公开
    ELECTRONIC PART AND MANUFACTURING METHOD THEREOF 审中-公开
    电子元件及其制造方法

    公开(公告)号:EP1768255A4

    公开(公告)日:2012-09-12

    申请号:EP05765451

    申请日:2005-06-29

    申请人: PANASONIC CORP

    CPC分类号: H03H3/10 Y10T29/49002

    摘要: An electronic part includes: a substrate; a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and a protective film formed on the upper surface of the substrate so as to cover the comb-shaped electrode. The protective film has convex portions and concave portions. The convex portions are upwardly convex at the positions corresponding to the electrode fingers, and the concave portions are downwardly concave between the convex portions. The cross section of the protective film in the direction orthogonal to the extending direction of the electrode fingers has a downward convex curve between apex portions of the convex portions.

    ELASTIC WAVE ELEMENT
    3.
    发明公开
    ELASTIC WAVE ELEMENT 审中-公开
    弹性波元件

    公开(公告)号:EP2109218A4

    公开(公告)日:2012-11-28

    申请号:EP08751689

    申请日:2008-05-09

    申请人: PANASONIC CORP

    CPC分类号: H03H9/0222

    摘要: An elastic wave element includes a piezoelectric substrate, an interdigital electrode provided on the piezoelectric substrate, a silicon oxide film covering the interdigital electrode, and a silicon nitride oxide film provided on the silicon oxide film. A film thickness H of the silicon oxide film and a wave length » of an elastic wave propagating through the piezoelectric substrate satisfies a relation of H/»‰¥0.15. The elastic wave element reduces fluctuation of propagation characteristics of elastic waves, and has high reliability.