摘要:
A structure which is a device using a lamb wave and can effectively control spurious due to a mode not desired. A lamb wave device (1) comprising a base substrate (2), a piezoelectric thin film (3) formed on the base substrate (2) and having a portion that is levitated from the base substrate (2) and has a first surface (3a) facing the base substrate (2) and a second surface (3b) on the opposite side to the first surface, and an IDT electrode (4) disposed on at least one of the first and the second surface of the piezoelectric thin film (3), wherein the piezoelectric thin film (3) consists of LiTaO3 or LiNbO3 and is a rotation twin crystal with the c axis of the piezoelectric thin film (3) oriented in almost the same direction of the normal to the first and second surfaces of the piezoelectric thin film (3) and with the c axis as the rotation axis thereof.
摘要:
A piezo-electric substrate 1 is mainly comprised of a base material 11, and a film 12 formed on one main surface of the base material 11. In the base material 11, the main surface on which the film 12 is formed is a roughed main surface 11a. The piezo-electric substrate 1 is obtained by forming the film 12 comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material 11 on the roughened main surface 11a using a thermal spraying method.
摘要:
A method of manufacturing a surface acoustic wave element (12) includes the steps of providing a piezoelectric body (10) having an interdigital transducer (11a), where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of the interdigital transducer (11a) and the piezoelectric body (10) simultaneously so as to reduce the thickness of the interdigital transducer and the piezoelectric body.
摘要:
A SAW device (11) includes a SAW element (13) which is bonded onto a support substrate (12) in a face down mode through solder (19, 20), and a metal cap (21) enclosing the SAW element (13). Assuming that α 1 , α 2 and α 3 represent the thermal expansion coefficients of the SAW element (13), the support substrate (12) and the conductive cap (21) along the surface wave propagation direction respectively, α 3 ≧ α 1 when α 1 > α 2 , and α 3 ≦ α 1 when α 1 2 .
摘要:
An electronic part includes: a substrate; a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and a protective film formed on the upper surface of the substrate so as to cover the comb-shaped electrode. The protective film has convex portions and concave portions. The convex portions are upwardly convex at the positions corresponding to the electrode fingers, and the concave portions are downwardly concave between the convex portions. The cross section of the protective film in the direction orthogonal to the extending direction of the electrode fingers has a downward convex curve between apex portions of the convex portions.