ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT SENSOR
    6.
    发明公开
    ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT SENSOR 审中-公开
    声表面波元件和声波元件SENSOR

    公开(公告)号:EP2477332A4

    公开(公告)日:2013-12-25

    申请号:EP10815120

    申请日:2010-08-30

    申请人: PANASONIC CORP

    IPC分类号: G01N29/02 H03H9/02

    摘要: An acoustic wave element includes a piezoelectric body, an input IDT electrode, an output IDT electrode, a propagation path provided between the input IDT electrode and the output IDT electrode, a first dielectric layer provided on the piezoelectric body so as to cover the input IDT electrode and the output IDT electrode, and a reactive portion provided on the propagation path and reacting to a substance to be detected or a binding substance that binds with the substance to be detected. The main acoustic wave becomes, in the input IDT electrode and the output IDT electrode, a boundary acoustic wave that propagates between the piezoelectric body and the first dielectric layer, and becomes, in the propagation path, a surface acoustic wave that propagates on an upper surface of the propagation path. With this structure, deterioration of the element characteristic is suppressed.