公开(公告)号：EP2555269A4

公开(公告)日：2014-05-14

申请号：EP11765654

申请日：2011-03-30

Applicant: PANASONIC CORP

Inventor： MATSUSHIMA TOMOAKI ,  YAMAUCHI NORIHIRO ,  OGAWA JUNYA ,  AIZAWA KOICHI

IPC: H01L21/8246 ,  H01L41/313 ,  B81C3/00 ,  G01J1/02 ,  H01L27/105 ,  H01L37/02 ,  H01L41/08 ,  H01L41/113 ,  H01L41/18 ,  H01L41/22 ,  H01L41/316 ,  H01L41/319 ,  H01L41/33 ,  H01L41/39

CPC classification number: G01J5/34 ,  H01L28/56 ,  H01L37/02 ,  H01L41/1136 ,  H01L41/313 ,  H01L41/319

Abstract: A seed layer having a predetermined pattern is formed on a side of one surface of a second substrate, and a ferroelectric layer is formed on the side of said one surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded via a bonding layer. A laser beam with a predetermined wavelength is irradiated from a side of other surface of the second substrate to transfer a ferroelectric film, which overlaps with the seed layer, of the ferroelectric layer and the seed layer onto the side of said one surface of the first substrate. The laser beam is a beam with a wavelength, herein the beam passes through the second substrate, and is reflected by the seed layer, and moreover is absorbed by a second portion of the ferroelectric layer. The second portion does not overlap with the seed layer.

公开(公告)号：EP2566038A4

公开(公告)日：2014-10-15

申请号：EP11775093

申请日：2011-04-28

Applicant: PANASONIC CORP

Inventor： OGAWA JUNYA ,  YAMAUCHI NORIHIRO ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H02N2/18 ,  H01L41/113

CPC classification number: H01L41/1136

公开(公告)号：EP2562837A4

公开(公告)日：2014-03-19

申请号：EP11771971

申请日：2011-04-18

Applicant: PANASONIC CORP

Inventor： OGAWA JUNYA ,  YAMAUCHI NORIHIRO ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H01L41/113 ,  B81B7/02 ,  G01J1/02 ,  G01P15/09 ,  H01L41/08 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/23 ,  H01L41/319 ,  H01L41/39 ,  H02N2/18

CPC classification number: H01L41/1136 ,  B81B2201/032 ,  B81C1/00658 ,  G01J5/04 ,  G01J5/046 ,  G01J5/34 ,  G01P15/09 ,  G01P2015/0828 ,  H01L37/02 ,  H01L41/0815 ,  H02N2/186

Abstract: A ferroelectric device comprises: a silicon substrate (a first substrate) 10; a lower electrode (a first electrode) 14a formed on one surface side of first substrate 10; a ferroelectric film 14b formed on a surface of lower electrode 14a opposite to first substrate 10 side; and an upper electrode (a second electrode) 14c formed on a surface of ferroelectric film 14b opposite to lower electrode 14a side. The ferroelectric film 14b is formed of a ferroelectric material with a lattice constant difference from silicon. The ferroelectric device further comprises a shock absorbing layer 14d formed of a material with better lattice matching with ferroelectric film 14b than silicon and provided directly below the lower electrode 14a. The first substrate 10 is provided with a cavity 10a that exposes a surface of shock absorbing layer 14d opposite to lower electrode 14a side.

公开(公告)号：EP2624434A4

公开(公告)日：2013-10-02

申请号：EP11829197

申请日：2011-09-28

Applicant: PANASONIC CORP

Inventor： YAMAUCHI NORIHIRO ,  OGAWA JUNYA ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H01L41/113 ,  B81B3/00 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/253 ,  H01L41/39 ,  H02N2/18

CPC classification number: H01L41/1136 ,  H02N2/181 ,  H02N2/186

Abstract: A vibration power generation element includes a base substrate having a support portion and a cantilever portion, and a power generation unit for generating alternating current power in response to vibration of the cantilever portion. The power generation unit includes: a lower electrode formed on one surface side of the base substrate so as to overlap the cantilever portion; a first piezoelectric layer formed on an opposite side of the lower electrode from the cantilever portion; an intermediate electrode formed on an opposite side of the first piezoelectric layer from the lower electrode; a second piezoelectric layer formed on an opposite side of the intermediate electrode from the first piezoelectric layer; and an upper electrode formed on an opposite side of the second piezoelectric layer from the intermediate electrode.

公开(公告)号：EP2566039A4

公开(公告)日：2014-10-08

申请号：EP11775096

申请日：2011-04-28

Applicant: PANASONIC CORP

Inventor： OGAWA JUNYA ,  YAMAUCHI NORIHIRO ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H02N2/18 ,  H01L41/113

CPC classification number: H02N2/188 ,  B81B3/0078 ,  H01L41/1136

公开(公告)号：EP2611024A4

公开(公告)日：2014-07-09

申请号：EP11819916

申请日：2011-08-23

Applicant: PANASONIC CORP

Inventor： YAMAUCHI NORIHIRO ,  OGAWA JUNYA ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H02N2/00 ,  H01L41/113

CPC classification number: H01L41/1136 ,  H02N2/186

公开(公告)号：EP2672538A4

公开(公告)日：2013-12-11

申请号：EP12742495

申请日：2012-01-31

Applicant: PANASONIC CORP

Inventor： YAMAUCHI NORIHIRO ,  OGAWA JUNYA ,  GOTO KOUJI ,  MATSUSHIMA TOMOAKI ,  AIZAWA KOICHI

IPC: H01L41/113 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/257 ,  H01L41/29 ,  H01L41/316 ,  H01L41/39 ,  H02N2/00 ,  H02N2/18

CPC classification number: H05K1/18 ,  H01L41/042 ,  H01L41/1136 ,  H02N2/181 ,  H02N2/186

Abstract: Providing a power generating device that can output higher power as well as downsize the device, and providing a power generating module using the same. The power generating device 1 has a power generating section 20 that includes a piezoelectric body 21; and a plurality of electrode pairs each constituted by a pair of electrodes (22, 23) that are placed on opposite sides of the piezoelectric body 21 with regard to a thickness direction thereof to define a functional section 21a therebetween, each of the functional sections 21a is cooperated with the related electrode pair (22, 23) to define a power generating element 200. A plurality of the power generating elements 200 includes a first power generating element 201 and a second power generating element 202 configured to give a polarization orientation opposite to each other in the thickness direction. The first and second power generating elements (201, 202) are configured to have the corresponding electrodes (22, 22) that are connected to each other by means of a wiring member 24 on the same surface of the piezoelectric body 21 with regard to the thickness direction thereof, such that all of the plurality of the power generating elements 200 are connected in series.