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公开(公告)号:EP2502926A4
公开(公告)日:2013-07-31
申请号:EP10831618
申请日:2010-11-18
发明人: SHINKAI SEIJI , HARAGUCHI SHUICHI , SHIRAKI TOMOHIRO , OGAWA MASASHI , NAKATANI SHUHEI , SAKANOUE KEI , GOTO OSAMU , KAKIMOTO HIDENOBU
CPC分类号: G03F7/027 , C07F7/12 , C07F7/1836 , G03F7/0046 , G03F7/0755 , H01L51/0056 , H01L51/0095
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2.DEVICE, THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE DEVICE AND METHOD FOR MANUFACTURING THE THIN FILM TRANSISTOR 有权
标题翻译: 设备,薄膜晶体管制造用于制造薄膜晶体管的设备和方法公开(公告)号:EP2503615A4
公开(公告)日:2013-08-28
申请号:EP10831619
申请日:2010-11-18
发明人: SHINKAI SEIJI , HARAGUCHI SHUICHI , SHIRAKI TOMOHIRO , OGAWA MASASHI , NAKATANI SHUHEI , SAKANOUE KEI , GOTO OSAMU , KAKIMOTO HIDENOBU
CPC分类号: H01L51/0512 , C09K11/06 , C09K2211/1007 , C09K2211/1011 , C09K2211/1029 , G03F7/0046 , H01L27/3246 , H01L51/0558 , H01L51/56 , H01L2227/323 , H05B33/10
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