公开(公告)号：EP0924743A1

公开(公告)日：1999-06-23

申请号：EP99200725.2

申请日：1994-07-25

申请人： PHILIPS ELECTRONICS NORTH AMERICA CORPORATION

发明人： Knowles, Ralph W. ,  Schultz, William G. ,  Armstrong, Allen E.

IPC分类号： H01J37/256 ,  H01J37/244

CPC分类号： H01J37/228 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/24475 ,  H01J2237/2605

摘要： Electron detector configuration for an environmental scanning electron microscope (ESEM), for detecting electrons emanating from the surface of the specimen. The detecting means comprise a printed circuit board (132) including a detector head (134) having thereon an electrically biased ring detector electrode (136), the ring electrode being disposed between the specimen (24) and a pressure limiting aperture (144) that is positioned at the interface of the vacuum column (10) and the specimen chamber (22). The pressure limiting aperture is preferably provided with means for electrically biassing it such that it can act as an electrically biased pressure limiting aperture detector, and it is preferably formed integrally on the printed circuit board (132).

摘要翻译： 用于环境扫描电子显微镜（ESEM）的电子检测器配置，用于检测从样品表面发出的电子。 检测装置包括印刷电路板（132），其包括其上具有电偏置环检测器电极（136）的检测器头（134），所述环形电极设置在样本（24）和限压孔（144）之间， 位于真空塔（10）和试样室（22）的界面处。 压力限制孔优选地设置有用于电气偏置的装置，使得其可以用作电偏压限压孔径检测器，并且其优选地一体地形成在印刷电路板（132）上。