公开(公告)号：EP0924743A1

公开(公告)日：1999-06-23

申请号：EP99200725.2

申请日：1994-07-25

申请人： PHILIPS ELECTRONICS NORTH AMERICA CORPORATION

发明人： Knowles, Ralph W. ,  Schultz, William G. ,  Armstrong, Allen E.

IPC分类号： H01J37/256 ,  H01J37/244

CPC分类号： H01J37/228 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/24475 ,  H01J2237/2605

摘要： Electron detector configuration for an environmental scanning electron microscope (ESEM), for detecting electrons emanating from the surface of the specimen. The detecting means comprise a printed circuit board (132) including a detector head (134) having thereon an electrically biased ring detector electrode (136), the ring electrode being disposed between the specimen (24) and a pressure limiting aperture (144) that is positioned at the interface of the vacuum column (10) and the specimen chamber (22). The pressure limiting aperture is preferably provided with means for electrically biassing it such that it can act as an electrically biased pressure limiting aperture detector, and it is preferably formed integrally on the printed circuit board (132).

摘要翻译： 用于环境扫描电子显微镜（ESEM）的电子检测器配置，用于检测从样品表面发出的电子。 检测装置包括印刷电路板（132），其包括其上具有电偏置环检测器电极（136）的检测器头（134），所述环形电极设置在样本（24）和限压孔（144）之间， 位于真空塔（10）和试样室（22）的界面处。 压力限制孔优选地设置有用于电气偏置的装置，使得其可以用作电偏压限压孔径检测器，并且其优选地一体地形成在印刷电路板（132）上。

公开(公告)号：EP1003200A1

公开(公告)日：2000-05-24

申请号：EP99204274.7

申请日：1996-08-08

申请人： PHILIPS ELECTRONICS NORTH AMERICA CORPORATION

发明人： Knowles, Ralph W. ,  Hardt, Thomas A.

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605

摘要： An environmental scanning electron microscope is provided with means to maintain a specimen at a temperature approximately 1500°C. In this microscope, a specimen chamber (22) maintains the specimen (24) enveloped in a gas in registration with a final pressure limiting aperture of the objective lens assembly. The specimen chamber includes a specimen stage (0) having a sample platform (49) for supporting the specimen under examination at a first vertical height and a specimen heating assembly (56) which includes a non-inductively wound heater coil (58) which is positioned closely adjacent to the sample platform and extends to a second height which is significantly above the first vertical height so that the top of the specimen is maintained at a high temperature. In this microscope, a heat shield assembly (68) is positioned above the specimen heating assembly in the specimen chamber to avoid radiant heat loss and which has an adjustable bias voltage (80) applied thereto to accelerate secondary electrons through its central opening to be collected by an electron detector (136). In order to enhance image quality, the final aperture and electron detector are biased at different voltages with the bias to said aperture floated to provide automatic compensation. A specimen moving assembly (210) is also provided to move the specimen stage with respect to the heat shield assembly.

摘要翻译： 环境扫描电子显微镜具有用于将样品保持在约1500℃的温度的装置。在该显微镜中，样品室（22）将样品（24）保持在气体中，与气体的最终压力限制孔 物镜组件。 试样室包括具有用于支撑在第一垂直高度处检查的试样的试样平台（49）的试样台（0）和包括非感应卷绕的加热器线圈（58）的试样加热组件（56） 定位成紧邻样品平台并且延伸到明显高于第一垂直高度的第二高度，使得样品的顶部保持在高温。 在该显微镜中，隔热组件（68）位于样品室中的样品加热组件上方，以避免辐射热损失，并且具有施加到其上的可调偏置电压（80）以加速二次电子通过其中心开口以被收集 通过电子检测器（136）。 为了提高图像质量，最终的孔径和电子检测器被偏置在不同的电压，偏置到所述孔径浮动以提供自动补偿。 还提供了样本移动组件（210）以相对于隔热组件移动样本台。