-
1.发明公开Substrate rotating device, and manufacturing method and apparatus of recording medium master 审中-公开衬底用于制造光记录介质的压模的旋转装置，以及方法和装置
公开(公告)号：EP1187121A3
公开(公告)日：2007-05-09
申请号：EP01121195.0
申请日：2001-09-04
申请人： Pioneer Corporation
发明人： Kumasaka, Osamu, Pioneer Corporation , Kuriyama, Kazumi, Pioneer Corporation , Kaneda, Hiroki, Pioneer Corporation , Sone, Masami, Pioneer Corporation , Kamimura, Kenji, Pioneer Corporation , Iwata, Takeharu, Pioneer Corporation , Kobayashi, Masaki, Pioneer Corporation
IPC分类号： G11B7/26
CPC分类号： F16C32/06 , B23Q1/38 , B23Q7/02 , B82Y10/00 , B82Y40/00 , F16C2322/39 , G11B7/26 , G11B7/261 , H01J37/3174 , H01J2237/31735 , H01L21/67242 , H01L21/6831
摘要： A master disc manufacturing apparatus includes an electron-beam emitting portion (40) for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion (60) for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.
摘要翻译： 甲母盘制造装置，具有在电子束发射在电子束电子束会聚部分用于会聚电子束用于与负电势施加具有在基板的发光部（40），阻滞电压施加部（60） 减速电子束的大小，并在真空气氛生产部分用于抽空的腔室，以在其中产生的真空的气氛。
-
2.发明公开Substrate rotating device, and manufacturing method and apparatus of recording medium master 审中-公开衬底用于制造光记录介质的压模的旋转装置，以及方法和装置
公开(公告)号：EP1187121A2
公开(公告)日：2002-03-13
申请号：EP01121195.0
申请日：2001-09-04
申请人： Pioneer Corporation
发明人： Kumasaka, Osamu, Pioneer Corporation , Kuriyama, Kazumi, Pioneer Corporation , Kaneda, Hiroki, Pioneer Corporation , Sone, Masami, Pioneer Corporation , Kamimura, Kenji, Pioneer Corporation , Iwata, Takeharu, Pioneer Corporation , Kobayashi, Masaki, Pioneer Corporation
IPC分类号： G11B7/26
CPC分类号： F16C32/06 , B23Q1/38 , B23Q7/02 , B82Y10/00 , B82Y40/00 , F16C2322/39 , G11B7/26 , G11B7/261 , H01J37/3174 , H01J2237/31735 , H01L21/67242 , H01L21/6831
摘要： A master disc manufacturing apparatus includes an electron-beam emitting portion (40) for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion (60) for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.
-
搜索结果
2 条记录 (耗时 0.007 秒)
