公开(公告)号：EP1389152A4

公开(公告)日：2009-04-15

申请号：EP02737128

申请日：2002-05-22

申请人： QED TECHNOLOGIES INTERNATIONAL

发明人： KORDONSKI WILLIAM ,  HOGAN STEHEN ,  CARAPELLA JERRY

IPC分类号： B24B57/02 ,  B24B31/112 ,  B24B37/00 ,  B24B57/04 ,  F16K13/10 ,  F16K31/06 ,  B24B1/00

CPC分类号： B24B1/005 ,  B24B31/112 ,  B24B57/04 ,  F16K13/10 ,  F16K31/06 ,  Y02P70/179 ,  Y10S137/909

摘要： A magnetorheological fluid delivery system includes a mixing and tempering vesse, (52). Fluid, 11, is amitted to the vessel via a plurality of tangential ports, (55), created a mixing of the fluid in the vessel and promoting homogeneity. Fluid may be reconstituted in the vessel by metered addition of carrier fluid. A fixed-speed centrigugal pump, (66), disposed in the vessel pressurizes the system. Fluid is pumped through a magnetic-induciton flowmeter, (24), and a magnetic flow control valve, (86), having solenoid windings whereby MR fluid is magnectically stiffened to restrict flow.

公开(公告)号：EP1526948A4

公开(公告)日：2009-03-25

申请号：EP03755733

申请日：2003-08-04

申请人： QED TECHNOLOGIES INTERNATIONAL

发明人： TRICARD MARC ,  KORDONSKI WILLIAM

IPC分类号： B24B49/00 ,  B24B1/00 ,  B24B7/22 ,  B24B31/112 ,  B24B49/12 ,  C03C17/23 ,  G01B11/30 ,  G01J9/02 ,  H01L21/304

CPC分类号： B24B49/12 ,  B24B1/005 ,  B24B7/228 ,  B24B31/112 ,  G01B11/06 ,  G01B11/306

摘要： An improved method for producing a thin layer having highly uniform thickness, which layer may be pre-coated on an undulating surface of a substrate element. A working layer of the material is formed having a thickness greater than the final thickness desired. An areal (XY) determination of working layer thickness is made by ellipsometry, laser interferometry, or x-ray diffraction, or other known means. A map of thicknesses to be removed from the free surface of the working layer is entered into the control system of a magnetorheological finishing apparatus. The working layer is mounted on a workpiece holder of the apparatus and correctly indexed to the machine. The machine then removes material by magnetorheological finishing as instructed by the control system to leave a residual layer having a very high degree of thickness uniformity at a nominal average thickness and a very high surface integrity.