System for magnetorheological finishing of substrates
    10.
    发明公开
    System for magnetorheological finishing of substrates 有权
    系统用于衬底的磁流变超精加工

    公开(公告)号:EP1018398A2

    公开(公告)日:2000-07-12

    申请号:EP99126243.7

    申请日:1999-12-31

    摘要: An improved system for increasing the effectiveness of magnetorheological finishing of a substrate. An inline flowmeter is close-loop linked to the rotational speed of a pressurizing pump to assure that the flow of magnetorheological fluid (MRF) to the work zone is constant. A simplified capillary viscometer is disposed in the fluid delivery system at the exit thereof onto the wheel surface. Output signals from the flowmeter and the viscometer pressure sensor are sent to a computer which calculates the viscosity of MRF being delivered to the work zone and causes replenishment of carrier fluid to the work-concentrated MRF to return the viscosity to aim to assure that a constant concentration of magnetic solids is being provided to the work zone. Asymmetric pole pieces for the field magnet at the work zone extend the magnetic field along the wheel surface upstream of the work zone to permit full magnetic stiffening of the MRF before it engages the work piece, while minimizing fringing field in the vicinity of the viscometer, and to shorten the magnetic field along the wheel surface downstream of the work zone.