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公开(公告)号:EP4256607A1
公开(公告)日:2023-10-11
申请号:EP21816620.5
申请日:2021-11-17
发明人: CHINTARLAPALLI REDDY, Harikrishna , SANA, Pradeep Kumar , LEE, Chulkyu , LEE, Jeffrey Charles , MOHAMAD, Sajin
IPC分类号: H01L21/8238 , H01L27/02 , H01L27/092
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公开(公告)号:EP3942608A1
公开(公告)日:2022-01-26
申请号:EP20715230.7
申请日:2020-02-26
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