公开(公告)号：EP1516167A1

公开(公告)日：2005-03-23

申请号：EP03759809.1

申请日：2003-02-13

申请人： ROBERT BOSCH GMBH

发明人： GUENSCHEL, Roland ,  MUEHLHEIM, Richard ,  ZAPPEL, Bernhard ,  PINTER, Stefan ,  BENZEL, Hubert ,  MUCHOW, Joerg ,  WEIBLEN, Kurt

IPC分类号： G01L9/00

CPC分类号： G01L9/0042 ,  G01L19/147 ,  H01L2224/48091 ,  H01L2224/48472 ,  H01L2924/00014

摘要： The invention relates to a sensor, which is suitable for measuring high pressure and a method for producing said sensor. According to said method, a cavity (500) with a high aspect ratio is configured in a semiconductor material (51).

公开(公告)号：EP1634039A1

公开(公告)日：2006-03-15

申请号：EP04728320.5

申请日：2004-04-20

申请人： ROBERT BOSCH GMBH

发明人： SPIEGEL, Hans-Juergen ,  GROTE, Regina ,  MUEHLHEIM, Richard ,  STRATMANN, Andreas ,  MAST, Martin ,  WOERSINGER, Juergen

IPC分类号： G01D11/24 ,  G01L19/14 ,  H01L23/492

CPC分类号： H01L23/045 ,  G01D11/245 ,  G01L19/14 ,  G01L19/143 ,  H01L23/10 ,  H01L2224/49113 ,  H01L2224/49171 ,  Y10T29/49002

摘要： Disclosed is a self-centering pedestal design comprising a housing that is provided with a wall (1) while the bottom is provided with at least one pedestal (4). Said pedestal (4) encompasses a predefined edge. According to the invention, the edge of the pedestal (4) comprises at least two areas, a first area (A) being located closer to the housing wall (1) and a second area (B) being located further away from the housing wall (1), e.g. in the shape of an octagon, in order to be able to fill said housing with a passivating agent so as to stabilize the connection between the lid (1) and the bottom (2) of the housing. The invention applies to sensors detecting a pressure, temperature, throughput, acceleration, yaw rate, or rotational speed.

公开(公告)号：EP1634039B1

公开(公告)日：2007-04-25

申请号：EP04728320.5

申请日：2004-04-20

申请人： ROBERT BOSCH GMBH

发明人： SPIEGEL, Hans-Juergen ,  GROTE, Regina ,  MUEHLHEIM, Richard ,  STRATMANN, Andreas ,  MAST, Martin ,  WOERSINGER, Juergen

IPC分类号： G01D11/24 ,  G01L19/14 ,  H01L23/492

CPC分类号： H01L23/045 ,  G01D11/245 ,  G01L19/14 ,  G01L19/143 ,  H01L23/10 ,  H01L2224/49113 ,  H01L2224/49171 ,  Y10T29/49002

摘要： Disclosed is a self-centering pedestal design comprising a housing that is provided with a wall (1) while the bottom is provided with at least one pedestal (4). Said pedestal (4) encompasses a predefined edge. According to the invention, the edge of the pedestal (4) comprises at least two areas, a first area (A) being located closer to the housing wall (1) and a second area (B) being located further away from the housing wall (1), e.g. in the shape of an octagon, in order to be able to fill said housing with a passivating agent so as to stabilize the connection between the lid (1) and the bottom (2) of the housing. The invention applies to sensors detecting a pressure, temperature, throughput, acceleration, yaw rate, or rotational speed.