利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

25 条记录 (耗时 0.014 秒)

    MIKROMECHANISCHES SENSORELEMENT
    5.
    发明授权
    MIKROMECHANISCHES SENSORELEMENT 有权
    微机械传感器元件

    公开(公告)号：EP1966576B1

    公开(公告)日：2011-06-15

    申请号：EP06830059.9

    申请日：2006-11-21

    申请人： ROBERT BOSCH GMBH

    发明人： MUCHOW, Joerg ,  BENZEL, Hubert ,  ARMBRUSTER, Simon ,  SCHELLING, Christoph

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0054 ,  G01L9/0055

    摘要： Disclosed is a micromechanical sensor element (1) comprising a closed membrane (2) which is mounted within a frame (3). Said sensor element (1) is very sensitive and compact while being provided with great resistance to overload and allowing measured values to be detected in a piezoresistive manner. For this purpose, at least one support element (4) that is joined to the frame (3) via at least one connecting web (5) is embodied in the area of the membrane (2). Furthermore, piezo resistors (6) are disposed in the area of the connecting web (5) so as to detect a deformation.

    MIKROMECHANISCHES BAUTEIL UND VERFAHREN ZUM BETREIBEN EINES MIKROMECHANISCHEN BAUTEILS
    9.
    发明公开
    MIKROMECHANISCHES BAUTEIL UND VERFAHREN ZUM BETREIBEN EINES MIKROMECHANISCHEN BAUTEILS 有权
    密克罗尼西亚白俄罗斯维多利亚ZUM BETREIBEN EINES MIKROMECHANISCHEN BAUTEILS

    公开(公告)号：EP2347299A1

    公开(公告)日：2011-07-27

    申请号：EP09783091.3

    申请日：2009-09-16

    申请人： Robert Bosch GmbH

    发明人： PINTER, Stefan ,  MUCHOW, Joerg ,  FRITZ, Joachim ,  FRIESE, Christoph

    IPC分类号： G02B26/08 ,  G02B26/10

    CPC分类号： G02B26/0833 ,  G02B27/01 ,  Y10S359/90

    摘要： The invention relates to a micromechanical component, comprising a light window (12); a mirror element (10), which can be adjusted with respect to the light window (12) about at least one axis of rotation (14, 16) from of a first position into at least a second position; an optical sensor (34a, 34b) having a detection surface, which is designed to determine a light intensity on the detection surface and to provide a corresponding sensor signal (A, B), wherein the light window (12), the mirror element (10) in the first position and the detection surface are arranged in relation to one another such that a portion (32) of a light beam (30), which is reflected on the light window (12) and deflected by the mirror element (10) onto the light window (12), strikes the detection surface at least partially; and comprising an evaluation unit, which is designed to define, on the basis of the sensor signal (A, B), information with respect to a current position of the mirror element (10) relative to the light window (12) and/or with respect to a current intensity of the deflected light beam (30). In addition, the invention relates to a method for operating a micromechanical component.

    摘要翻译： 微机械部件具有光窗口; 相对于所述光窗口从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的镜子元件;光学传感器，其具有设计成确定所述检测表面上的光强度的检测表面，并且提供对应的 传感器信号。 光窗，处于第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。