公开(公告)号：EP2071400A1

公开(公告)日：2009-06-17

申请号：EP08168807.9

申请日：2008-11-11

申请人： Rohm and Haas Electronic Materials LLC

发明人： Amara, John P ,  Pugliano, Nicola ,  Sung, Jin Wuk ,  Gallagher, Michael K ,  Castorano, Michael S

IPC分类号： G03F7/075 ,  G03F7/09

CPC分类号： G03F7/091 ,  G03F7/0752

摘要： In one aspect, the invention relates to silicon-containing organic coating compositions, particularly antireflective coating compositions, that contain a repeat unit wherein chromophore moieties such as phenyl are spaced from Si atom(s). In another aspect, silicon-containing underlayer compositions are provided that are formulated as a liquid (organic solvent) composition, where at least one solvent of the solvent component comprise hydroxy groups.

摘要翻译： 一方面，本发明涉及含有重复单元的含硅有机涂料组合物，特别是抗反射涂料组合物，其中发色团部分例如苯基与Si原子间隔开。 另一方面，提供配制成液体（有机溶剂）组合物的含硅底层组合物，其中溶剂组分的至少一种溶剂包含羟基。