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    DRY ETCHING AGENT AND DRY ETCHING METHOD
    5.
    发明公开
    DRY ETCHING AGENT AND DRY ETCHING METHOD 审中-公开
    TROCKENÄTZMITTELUNDTROCKENÄTZVERFAHREN

    公开(公告)号：EP2595179A1

    公开(公告)日：2013-05-22

    申请号：EP11806613.3

    申请日：2011-06-24

    申请人： Central Glass Company, Limited

    发明人： UMEZAKI, Tomonori ,  HIBINO, Yasuo ,  MORI, Isamu ,  OKAMOTO, Satoru ,  KIKUCHI, Akiou

    IPC分类号： H01L21/3065 ,  C07C21/18 ,  C09K13/08

    CPC分类号： C09K13/00 ,  C09K13/08 ,  H01L21/31116

    摘要： A dry etching agent according to the present invention preferably contains: (A) 1,3,3,3-tetrafluoropropene; (B) at least one kind of additive gas selected from the group consisting of H 2 , O 2 , O 3 , CO, CO 2 , COCl 2 , COF 2 , CF 3 OF, NO 2 , F 2 , NF 3 , Cl 2 , Br 2 , I 2 , CH 4 , C 2 H 2 , C 2 H 4 , C 2 H 6 , C 3 H 4 , C 3 H 6 , C 3 H 8 , HF, HI, HBr, HCl, NO, NH 3 and YF n (where Y represents Cl, Br or I; and n represents an integer satisfying 1 ≤ n ≤ 7); and (C) an inert gas. This dry etching agent has less effect on the global environment and can obtain a significant improvement in process window and address processing requirements such as low side etching ratio and high aspect ratio even without any special substrate excitation operation.

    摘要翻译： 根据本发明的干蚀刻剂优选含有：（A）1,3,3,3-四氟丙烯; （B）选自H 2，O 2，O 3，CO，CO 2，COCl 2，COF 2，CF 3 OF，NO 2，F 2，NF 3，Cl的至少一种添加剂气体 2，Br 2，I 2，CH 4，C 2 H 2，C 2 H 4，C 2 H 6，C 3 H 4，C 3 H 6，C 3 H 8，HF，HI，HBr，HCl，NO ，NH 3和YF n（其中Y表示Cl，Br或I; n表示满足1‰‰n‰的整数）; 和（C）惰性气体。 这种干蚀刻剂对全球环境的影响较小，即使没有特殊的基板激励操作，也可以显着改善工艺窗口和地址处理要求，如低边蚀刻率和高纵横比。

    METHOD FOR DEHYDRATING HYDROFLUOROCARBON OR HYDROCHLOROFLUOROCARBON, AND METHOD FOR PRODUCING 1,3,3,3-TETRAFLUOROPROPANE USING SAID DEHYDRATING METHOD
    7.
    发明授权
    METHOD FOR DEHYDRATING HYDROFLUOROCARBON OR HYDROCHLOROFLUOROCARBON, AND METHOD FOR PRODUCING 1,3,3,3-TETRAFLUOROPROPANE USING SAID DEHYDRATING METHOD 有权
    用于加氢脱氟的方法和使用所述脱水方法生产1,3,3,3-四氟丙烷的方法

    公开(公告)号：EP2617699B1

    公开(公告)日：2018-04-25

    申请号：EP11824861.6

    申请日：2011-07-05

    申请人： Central Glass Company, Limited

    发明人： NISHIGUCHI, Yoshio ,  HIBINO, Yasuo

    IPC分类号： C07C17/383 ,  C07C17/21 ,  C07C17/25 ,  C07C17/38 ,  C07C21/18 ,  C07C17/20

    CPC分类号： C07C17/38 ,  C07C17/206 ,  C07C17/21 ,  C07C17/25 ,  C07C17/383 ,  C07C21/18 ,  C07C19/08

    摘要： There are provided a dehydration process of a hydrofluorocarbon or hydrochlorofluorocarbon, which can be done by a simple equipment, and a continuous production process of 1,3,3,3-tetrafluoropropene using the dehydration process. The dehydration process of the hydrofluorocarbon or hydrochlorofluorocarbon includes cooling the hydrofluorocarbon or hydrochlorofluorocarbon in gaseous form containing at least water by a heat exchanger, thereby condensing and liquefying the hydrofluorocarbon or hydrochlorofluorocarbon while freezing and solidifying the water. The production method of the 1,3,3,3-tetrafluoropropene includes a first step for fluorinating 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifluoropropene, hydrogen fluoride, hydrogen chloride and by-products, or dehydrofluorinating 1,1,1,3,3-pentafluoropropane to obtain a mixture of the 1,3,3,3-tetrafluoropropene, unreacted 1,1,1,3,3-pentafluoropropane and by-products, a second step for removing the acidic component, a third step for dehydrating the 1,3,3,3-tetrafluoropropene by the above dehydration process, and a fourth step for purifying the 1,3,3,3-tetrafluoropropene by distillation.

    DRY ETCHING AGENT AND DRY ETCHING METHOD USING THE SAME
    8.
    发明公开
    DRY ETCHING AGENT AND DRY ETCHING METHOD USING THE SAME 审中-公开
    TROCKENÄTZMITTELUNDTROCKENÄTZVERFAHRENDAMIT

    公开(公告)号：EP2511948A1

    公开(公告)日：2012-10-17

    申请号：EP11736976.9

    申请日：2011-01-25

    申请人： Central Glass Company, Limited

    发明人： HIBINO, Yasuo ,  UMEZAKI, Tomonori ,  KIKUCHI, Akiou ,  MORI, Isamu ,  OKAMOTO, Satoru

    IPC分类号： H01L21/3065 ,  C07C21/22 ,  C09K13/00

    CPC分类号： H01L21/31055 ,  C09K13/00 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/32136

    摘要： A dry etching agent according to the present invention contains (A) a fluorinated propyne represented by the chemical formula: CF 3 C≡CX where X is H, F, Cl, Br, I, CH 3 , CFH 2 or CF 2 H; and either of: (B) at least one kind of gas selected from the group consisting of O 2 , O 3 , CO, CO 2 , COCl 2 and COF 2 ; (C) at least one kind of gas selected from the group consisting of F 2 , NF 3 , Cl 2 , Br 2 , I 2 and YFn where Y is Cl, Br or I; and n is an integer of 1 to 5; and (D) at least one kind of gas selected from the group consisting of CF 4 , CHF 3 , C 2 F 6 , C 2 F 5 H, C 2 F 4 H 2 , C 3 F 8 , C 3 F 4 H 2 , C 3 ClF 3 H and C 4 F 8 . This dry etching agent has a small environmental load and a wide process window and can be applied for high-aspect-ratio processing without special operations such as substrate excitation.

    摘要翻译： 根据本发明的干蚀刻剂包含（A）由化学式CF 3 C¯CX表示的氟化丙炔，其中X是H，F，Cl，Br，I，CH 3，CFH 2或CF 2 H ; 和（B）选自O 2，O 3，CO，CO 2，COCl 2和COF 2中的至少一种气体; （C）选自F 2，NF 3，Cl 2，Br 2，I 2和YFn中的至少一种气体，其中Y为Cl，Br或I; n为1〜5的整数。 和（D）选自CF 4，CHF 3，C 2 F 6，C 2 F 5 H，C 2 F 4 H 2，C 3 F 8，C 3 F 4 H的至少一种气体 2，C 3 ClF 3 H和C 4 F 8。 这种干蚀刻剂具有小的环境负荷和宽的工艺窗口，并且可以应用于高纵横比处理，而不需要诸如基板激励的特殊操作。

    PROCESS FOR PRODUCTION OF 2-CHLORO-3,3,3-TRIFLUOROPROPENE
    9.
    发明公开
    PROCESS FOR PRODUCTION OF 2-CHLORO-3,3,3-TRIFLUOROPROPENE 有权
    VERFAHREN ZUR HERSTELLUNG VON 2-CHLOR-3,3,3-TRIFLUORPROPEN

    公开(公告)号：EP2457889A1

    公开(公告)日：2012-05-30

    申请号：EP10802226.0

    申请日：2010-07-16

    申请人： Central Glass Company, Limited

    发明人： HIBINO, Yasuo ,  KAWAGOE, Fumihiro ,  SAKYU, Fuyuhiko

    IPC分类号： C07C17/35 ,  C07C21/18 ,  C07B61/00

    CPC分类号： C07C17/23 ,  B01J21/18 ,  B01J23/44 ,  B01J23/628 ,  B01J23/6447 ,  C07C21/18

    摘要： There is provided according the present invention a process for producing 2-chloro-3,3,3-trifluoropropene, comprising: hydrogenating 1,2-dichloro-3,3,3-trifluoropropene with hydrogen (H 2 ) in the presence of a catalyst having a transition metal and a poisoning substance supported on a support. The present production process is industrially advantageous as the target 2-chloro-3,3,3-trifluoropropene can be obtained with high selectivity and high yield under moderate reaction conditions and with easy waste treatment.

    摘要翻译： 根据本发明提供了一种2-氯-3,3,3-三氟丙烯的制备方法，其包括：在存在氢气的情况下，用氢（H 2）氢化1,2-二氯-3,3,3-三氟丙烯 催化剂具有负载在载体上的过渡金属和中毒物质。 本发明的制备方法在工业上是有利的，因为在中等反应条件下容易的废物处理可以以高选择性和高收率获得目标2-氯-3,3,3-三氟丙烯。